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Dive into the research topics where Markus Heitz is active.

Publication


Featured researches published by Markus Heitz.


ieee sensors | 2013

Advanced methods for calculating quadrature errors of MEMS gyroscopes

Steven Kehrberg; Markus Dorwarth; Markus Heitz; Carsten Geckeler; Jan Mehner

MEMS vibratory angular rate sensors use the working principle of coupling a drive vibration mode with an orthogonal sense mode via Coriolis force. The parasitic coupling between the two eigenmodes caused by fabrication tolerances is called quadrature. Former work modeled quadrature effects between drive and detection mode by only adding a coupling term in the stiffness matrix. The new method is adding an inertial coupling term to the system mass matrix. This leads to a large decrease of the calculation time in combination with a higher accuracy.


Archive | 2007

ACCELERATION SENSOR WITH COMB-SHAPED ELECTRODES

Johannes Classen; Markus Heitz; Found Bennini


Archive | 2008

Beschleunigungssensor mit kammelektroden

Johannes Classen; Markus Heitz; Fouad Bennini


Archive | 2015

Rocker device for a micromechanical Z-sensor

Andreas Scheurle; Guenther-Nino-Carlo Ullrich; Markus Heitz; Andrea Ortó


Archive | 2014

rotational rate sensor having preset quadrature offset

Rolf Scheben; Christoph Gauger; Markus Heitz


Archive | 2011

Mikromechanisches Bauelement mit einer Dämpfungseinrichtung

Christoph Gauger; Markus Heitz


Archive | 2014

Wippeneinrichtung für einen mikromechanischen Z-Sensor Rocker device for a micromechanical sensor Z

Markus Heitz; Guenther-Nino-Carlo Ullrich; Andreas Scheurle; Andrea Ortó


Archive | 2014

Rocker means for a micro-mechanical Z sensor

Markus Heitz; Guenther-Nino-Carlo Ullrich; Andreas Scheurle; Andrea Ortó


Archive | 2013

Micromechanical structure for rotational rate sensor, has substrate and movable mass that is movably mounted opposite to substrate by spring element, where substrate is provided with main extension plane

Christoph Gauger; Patrick Wellner; Sebastian Gracki; Markus Heitz


Archive | 2013

Rate of rotation sensor with a preset offset quadrature

Markus Heitz; Christoph Gauger; Rolf Scheben

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