Andrew V. Hill | Researchain

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Featured researches published by Andrew V. Hill.

Archive | 2010

METROLOGY SYSTEMS AND METHODS

Daniel Kandel; Vladimir Levinski; Alexander Svizher; Joel L. Seligson; Andrew V. Hill; Ohad Bachar; Amnon Manassen; Yung-Ho Alex Chuang; Ilan Sela; Moshe Markowitz; Daria Negri; Efraim Rotem

Archive | 2008

COMPUTER-IMPLEMENTED METHODS, COMPUTER-READABLE MEDIA, AND SYSTEMS FOR IDENTIFYING ONE OR MORE OPTICAL MODES OF AN INSPECTION SYSTEM AS CANDIDATES FOR USE IN INSPECTION OF A LAYER OF A WAFER

Verlyn Fischer; Chris Maher; Harish P. Hiriyannaiah; Younus Vora; Ping Ding; Andrew V. Hill

Archive | 2005

Systems and methods for providing illumination of a specimen for inspection

Andrew V. Hill

Archive | 2007

Systems and method for simultaneously inspecting a specimen with two distinct channels

Courosh Mehanian; Hans Hansen; Yingjian Wang; Yuval Ben-Dov; Zheng-Wu Li; Andrew V. Hill; Mehdi Vaez-Iravani; Kurt Zimmermann

Archive | 2005

Fourier filters and wafer inspection systems

Guoheng Zhao; Mehdi Vaez-Iravani; Andrew V. Hill; Avijit Ray-Chaudhuri

Archive | 2011

DISCRETE POLARIZATION SCATTEROMETRY

Andrew V. Hill; Amnon Manassen; Daniel Kandel; Vladimir Levinski; Joel L. Seligson; Alexander Svizher; David Y. Wang; Lawrence D. Rotter; Johannes D. De Veer

Archive | 2014

Systems for Providing Illumination in Optical Metrology

Gregory Brady; Andrei V. Shchegrov; Lawrence D. Rotter; Derrick Shaughnessy; Anatoly Shchemelinin; Ilya Bezel; M. A. Arain; Anatoly A. Vasiliev; James Andrew Allen; Oleg Shulepov; Andrew V. Hill; Ohad Bachar; Moshe Markowitz; Yaron Ish-shalom; Ilan Sela; Amnon Manassen; Alexander Svizher; Maxim Khokhlov; Avi Abramov; Oleg Tsibulevsky; Daniel Kandel; Mark Ghinovker

Archive | 2011

OVERLAY METROLOGY BY PUPIL PHASE ANALYSIS

Amnon Manassen; Daniel Kandel; Moshe Baruch; Vladimir Levinski; Noam Sapiens; Joel L. Seligson; Andrew V. Hill; Ohad Bachar; Daria Negri; Ofer Zaharan

Archive | 2011