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Anh Duong

GlobalFoundries

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Publication

Featured researches published by Anh Duong.

Archive | 2014

Aqua Regia and Hydrogen Peroxide HCl Combination to Remove Ni and NiPt Residues

Anh Duong; Clemens Fitz; Olov Karlsson

Archive | 2015

method to etch cu/Ta/TaN selectively using dilute aqueous Hf/h2so4 solution

Anh Duong; Errol Todd Ryan

Archive | 2015

METHODS FOR ETCHING COPPER DURING THE FABRICATION OF INTEGRATED CIRCUITS

Reiner Willeke; Tanya Atanasova; Anh Duong; Greg Nowling

Archive | 2013

Selective etching of copper and copper-barrier materials by an aqueous base solution with fluoride addition

Anh Duong; Errol Todd Ryan

Meeting Abstracts | 2013

Process to Etch Ni and Pt Residues during Silicide Contact Electrode Processing Using Low Temperature Aqueous Solutions

Anh Duong; Clemens Fitz; Sven Metzger; Olov Karlsson; John Clayton Foster; Greg Nowling; Vincent Sih; Paul R. Besser

Archive | 2013

Microwave-assisted heating of strong acid solution to remove nickel platinum/platinum residues

Clemens Fitz; Sven Metzger; Paul R. Besser; Vincent Sih; Anh Duong

Archive | 2013

PROCESS TO REMOVE Ni AND Pt RESIDUES FOR NiPtSi APPLICATIONS

Anh Duong; Sean Barstow; Clemens Fitz; John Foster; Olov Karlsson; Bei Li; James Mavrinac

Archive | 2011

HIGH PRODUCTIVITY COMBINATORIAL WORKFLOW FOR PHOTORESIST STRIP APPLICATIONS

Bei Li; Sean Barstow; Anh Duong; Zhendong Hong; Ashley Lacey

Archive | 2011

PROCESS TO REMOVE Ni AND Pt RESIDUES FOR NiPtSi APPLICATIONS USING AQUA REGIA WITH MICROWAVE ASSISTED HEATING

Anh Duong; Olov Karlsson

Archive | 2011

Method for cleaning platinum residues on a semiconductor substrate

Anh Duong; Sean Barstow; Olov Karlsson; Bei Li; James Mavrinac

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Collaboration

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Olov Karlsson

GlobalFoundries

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Clemens Fitz

GlobalFoundries

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Bei Li

GlobalFoundries

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James Mavrinac

GlobalFoundries

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Sean Barstow

GlobalFoundries

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Sven Metzger

GlobalFoundries

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Errol Todd Ryan

GlobalFoundries

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Greg Nowling

GlobalFoundries

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John Foster

GlobalFoundries

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Paul R. Besser

GlobalFoundries

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