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Dive into the research topics where Anton Schnegg is active.

Publication


Featured researches published by Anton Schnegg.


Archive | 1988

Process and apparatus for etching semiconductor surfaces

Anton Schnegg; Gerhard Dr. Dipl.-Ing. Brehm; Helene Prigge; Robert Rurlander; Fritz Dr. Dipl.-Che. Ketterl


Archive | 1988

Method of haze-free polishing for semiconductor wafers

Helene Prigge; Anton Schnegg; Gerhard Dr. Dipl.-Ing. Brehm; Herbert Jacob


Journal of The Electrochemical Society | 1991

Acceptor Compensation in Silicon Induced by Chemomechanical Polishing

Helene Prigge; Peter Gerlach; Peter O. Hahn; Anton Schnegg; Herbert Jacob


Archive | 1989

Process for preserving the surface of silicon wafers

Helene Prigge; Anton Schnegg; Gerhard Dr. Dipl.-Ing. Brehm


Archive | 1995

Cleaning agent and method for cleaning semiconductor wafers

Roland Brunner; Georg Hochgesang; Anton Schnegg; Gertraud Thalhammer


Archive | 2000

Process for separating a semiconductor rod into a number of wafers comprises guiding a fluid on the surface of the rod and later in a cutting gap formed, and removing the dissolved reaction products with the fluid stream

Anton Schnegg; Robert Rurlaender


Archive | 1998

Method for mounting and demounting a semiconductor wafer, and material suited for this method

Norbert Franze; Franz Mangs; Robert Rurlaender; Anton Schnegg


Archive | 1998

Adhesive mixture suitable for mounting and demounting a semiconductor wafer

Robert Rurlaender; Norbert Franze; Franz Mangs; Anton Schnegg


Archive | 1988

Method to polish semiconductor wafer without streaks

Helene Prigge; Anton Schnegg; Gerhard Dr. Dipl.-Ing. Brehm; Herbert Jacob


Archive | 1988

Silicon wafers for producing oxide layers of high breakdown strength and process for the production thereof

Peter O. Hahn; Hubert Piontek; Anton Schnegg; Werner Dipl Phys Dr Zulehner

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