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Dive into the research topics where Gerhard Dr. Dipl.-Ing. Brehm is active.

Publication


Featured researches published by Gerhard Dr. Dipl.-Ing. Brehm.


Archive | 1988

Process and apparatus for etching semiconductor surfaces

Anton Schnegg; Gerhard Dr. Dipl.-Ing. Brehm; Helene Prigge; Robert Rurlander; Fritz Dr. Dipl.-Che. Ketterl


Archive | 1988

Method of haze-free polishing for semiconductor wafers

Helene Prigge; Anton Schnegg; Gerhard Dr. Dipl.-Ing. Brehm; Herbert Jacob


Archive | 1989

Process for preserving the surface of silicon wafers

Helene Prigge; Anton Schnegg; Gerhard Dr. Dipl.-Ing. Brehm


Archive | 1987

Process for sawing crystal rods or blocks into thin wafers

Gerhard Dr. Dipl.-Ing. Brehm; Karl-Heinz Langsdorf; Johann Niedermeier; Johann Glas


Archive | 1996

Method for the generation of stacking-fault-induced damage on the back of semiconductor wafers

Gerhard Dr. Dipl.-Ing. Brehm; Rudolf Mayrhuber; Johann Niedermeier


Archive | 1989

Method and apparatus for slicing crystalline wafers aided by magnetic field monitoring means

Joachim Dipl Ing Junge; Johann Glas; Johann Niedermeier; Gerhard Dr. Dipl.-Ing. Brehm


Archive | 1988

Process for sharpening cutting-off tools and cutting-off process

Gerhard Dr. Dipl.-Ing. Brehm; Johann Niedermeier


Archive | 1987

Process for sawing crystal rods or blocks into thin wafers using an annular blade saw

Gerhard Dr. Dipl.-Ing. Brehm; Karl-Heinz Langsdorf; Johann Niedermeier; Johann Glas


Archive | 1988

Method and liquid preparation for removing residues of auxiliary sawing materials from wafers

Gerhard Dr. Dipl.-Ing. Brehm; Manuela Knipf; Rudolf Mayrhuber; Jurgen Schuhmacher; Max Stadler


Archive | 1987

Process and device for the correction of the cutting direction for sawing crystal rods or blocks

Gerhard Dr. Dipl.-Ing. Brehm; Karl-Heinz Langsdorf; Johann Niedermeier; Johann Glas

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