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Arno Wiedenhofer

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Publication

Featured researches published by Arno Wiedenhofer.

Materials Science Forum | 1998

Growth of SiC Epitaxial Layers in a Vertical Cold Wall Reactor Suited for High Voltage Applications

Roland Rupp; Arno Wiedenhofer; Peter Friedrichs; Dethard Peters; Reinhold Schörner; Dietrich Stephani

Archive | 2001

Device for producing and processing semiconductor substrates

Roland Rupp; Arno Wiedenhofer

Archive | 2000

Device for mounting a substrate and method for producing an insert for a susceptor

Roland Rupp; Arno Wiedenhofer

Archive | 2001

Method for producing an ohmic contact

Roland Rupp; Arno Wiedenhofer

Materials Science and Engineering B-advanced Functional Solid-state Materials | 1999

Epitaxial growth of SiC in a single and a multi wafer vertical CVD system: a comparison.

Roland Rupp; Arno Wiedenhofer; Dietrich Stephani

Materials Science Forum | 2000

Reliability and Degradation of Metal-Oxide-Semiconductor Capacitors on 4H- and 6H-Silicon Carbide

Michael Treu; Reinhold Schörner; Peter Friedrichs; Roland Rupp; Arno Wiedenhofer; Dietrich Stephani; H. Ryssel

Archive | 1999

Silicon carbide component, especially a Schottky diode, is produced by forming an ohmic contact before high temperature growth of an epitaxial layer

Roland Rupp; Arno Wiedenhofer

Archive | 1999

High temperature silicon carbide semiconductor substrate production and treatment apparatus, especially for silicon carbide epitaxy, has a susceptor completely covered by a cover plate and the substrate

Roland Rupp; Arno Wiedenhofer

MRS Proceedings | 1999

Epitaxial Growth of SiC in a Vertical Multi-Wafer CVD System: Already Suited as Production Process?

Roland Rupp; Christian Hecht; Arno Wiedenhofer; Dietrich Stephani

Archive | 1999

SUBSTRATHALTERUNG FÜR SiC-EPITAXIE UND VERFAHREN ZUM HERSTELLEN EINES EINSATZES FÜR EINEN SUSZEPTOR

Roland Rupp; Arno Wiedenhofer

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Collaboration

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Roland Rupp

Infineon Technologies

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Dietrich Stephani

Siemens

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Peter Friedrichs

Siemens

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Reinhold Schörner

Siemens

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Christian Hecht

Siemens

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Dethard Peters

Siemens

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Karlheinz Hölzlein

Infineon Technologies

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Michael Treu

Infineon Technologies

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R. Rupp

Siemens

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