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Dive into the research topics where Alexander T. Schwarm is active.

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Featured researches published by Alexander T. Schwarm.


Computers & Chemical Engineering | 2013

Systems and control challenges in photovoltaic manufacturing processes: A modeling strategy for passivation and antireflection films

Raymond A. Adomaitis; Alexander T. Schwarm

Abstract A view of contemporary systems and control challenges in photovoltaic cell manufacturing is given in this paper, with emphasis on developing a modeling strategy for the optimization of silicon nitride SiNx:H films used for passivation and antireflection coatings in single and multicrystalline silicon solar cells. The overall framework integrates three modeling modules: a remote plasma-enhanced chemical vapor deposition reactor process model that predicts film composition and thickness based on process input parameters, a solar-optical module that relates antireflection film physical and chemical properties to the degree to which the spectral irradiance distribution is attenuated, and a solar cell device model that predicts cell power output and efficiency from the film properties and irradiance. Because the model couples process inputs to both photovoltaic cell performance and manufacturing process efficiency, the modeling approach can be used for the simultaneous optimization of process and product performance.


Archive | 2007

Dynamic metrology schemes and sampling schemes for advanced process control in semiconductor processing

Arulkumar Shanmugasundram; Alexander T. Schwarm


Archive | 2002

Method, system and medium for process control for the matching of tools, chambers and/or other semiconductor-related entities

Arulkumar Shanmugasundram; Helen R. Armer; Alexander T. Schwarm


Archive | 2006

Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles

Arulkumar Shanmugasundram; Alexander T. Schwarm; Gopalakrishna B. Prabhu


Archive | 2002

Integration of fault detection with run-to-run control

Terry Reiss; Arulkumar Shanmugasundram; Alexander T. Schwarm


Archive | 2002

Feedback control of plasma-enhanced chemical vapor deposition processes

Arulkumar Shanmugasundram; Alexander T. Schwarm; Ilias Iliopoulos; Alexander Parkhomovsky; Martin Jay Seamons


Archive | 2002

Integrating tool, module, and fab level control

Arulkumar Shanmugasundram; Alexander T. Schwarm


Archive | 2007

Ranged fault signatures for fault diagnosis

Jr. Lynn Jerry Harvey; Alexander T. Schwarm


Archive | 2004

System, method, and medium for monitoring performance of an advanced process control system

Alexander T. Schwarm


Archive | 2003

Method, system, and medium for handling misrepresentative metrology data within an advanced process control system

Alexander T. Schwarm; Arulkumar Shanmugasundram; Jacques Seror; Yuri Kokotov; Efim Entin

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