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Manoocher Birang

Applied Materials

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Publication

Featured researches published by Manoocher Birang.

Archive | 2003

Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus

Manoocher Birang; Allan Gleason; William L. Guthrie

Archive | 1997

Carrier head with a flexible membrane for a chemical mechanical polishing system

Steven M. Zuniga; Manoocher Birang; Hung Chen; Sen-Hou Ko

Archive | 1996

Apparatus and method for in-situ monitoring of chemical mechanical polishing operations

Manoocher Birang; Grigory Pyatigorsky

Archive | 2006

Integrated electroless deposition system

Dmitry Lubomirsky; Arulkumar Shanmugasundram; Allen L. D'Ambra; Timothy W. Weidman; Eugene Rabinovich; Svetlana Sherman; Manoocher Birang; Yaxin Wang; Michael Yang; Bradley Hansen

Archive | 2000

Closed-loop control of wafer polishing in a chemical mechanical polishing system

Steven M. Zuniga; Manoocher Birang

Archive | 1999

Apparatus and methods for chemical mechanical polishing with an advanceable polishing sheet

Manoocher Birang; Lawrence M. Rosenberg; Sasson Somekh; John M. White

Archive | 1998

Carrier head for chemical mechanical polishing a substrate

Steven M. Zuniga; Hung Chen; Manoocher Birang

Archive | 1996

Apparatus and method for in-situ endpoint detection and monitoring for chemical mechanical polishing operations

Manoocher Birang; Nils Johansson; Allan Gleason; Grigory Pyatigorsky

Archive | 1999

In-situ monitoring of linear substrate polishing operations

Fred C. Redeker; Manoocher Birang; Shijian Li; Sasson Somekh

Archive | 1995

Releasing a workpiece from an electrostatic chuck

Manoocher Birang; Grigory Pyatigorsky

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Collaboration

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Boguslaw A. Swedek

Applied Materials

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Nils Johansson

Applied Materials

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Allan Gleason

Applied Materials

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Sasson Somekh

Applied Materials

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Steven M. Zuniga

Applied Materials

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Grigory Pyatigorsky

Applied Materials

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Semyon Sherstinsky

Applied Materials

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Shamouil Shamouilian

Applied Materials

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Shijian Li

Applied Materials

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John F. Cameron

Applied Materials

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