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Arun K. Nanda

Agere Systems

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Publication

Featured researches published by Arun K. Nanda.

Archive | 2007

Robust shallow trench isolation structures and a method for forming shallow trench isolation structures

Arun K. Nanda; Nace Rossi; Ranbir Singh

Archive | 2005

SHALLOW TRENCH ISOLATION STRUCTURES COMPRISING A GRADED DOPED SACRIFICIAL SILICON DIOXIDE MATERIAL AND A METHOD FOR FORMING SHALLOW TRENCH ISOLATION STRUCTURES

Nace Rossi; Ranbir Singh; Arun K. Nanda

Archive | 2004

Trench isolation structure and method of manufacture therefor

Arun K. Nanda; Nace Rossi; Ranbir Singh

Archive | 2005

Control of wafer warpage during backend processing

Arun K. Nanda; Nace Rossi

Archive | 2000

Two phase chemical/mechanical polishing process for tungsten layers

Nace Layadi; Arun K. Nanda

Archive | 2010

Thermally stable BiCMOS fabrication method and bipolar junction transistors formed according to the method

Arun K. Nanda; Venkat Raghavan; Nace Rossi

Archive | 2001

Polishing head for pressurized delivery of slurry

Fook Loong Chin; Arun K. Nanda; Frank Miceli

Archive | 2005

Interconnect structure including tungsten nitride and a method of manufacture therefor

Sailesh Mansinh Merchant; Arun K. Nanda; Nace Rossi

Archive | 2000

Method for reducing dishing related issues during the formation of shallow trench isolation structures

Sailesh Chittipeddi; Arun K. Nanda; Ankineedu Velaga

Archive | 1994

Tungsten formation process

Sailesh Chittipeddi; Arun K. Nanda

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Collaboration

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Nace Rossi

Agere Systems

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Ranbir Singh

Agere Systems

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Sailesh Chittipeddi

Agere Systems

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Venkat Raghavan

Agere Systems

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Ankineedu Velaga

Agere Systems

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Fook Loong Chin

Agere Systems

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Frank Miceli

Agere Systems

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Nace Layadi

Agere Systems

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Sailesh Mansinh Merchant

Agere Systems

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