Is this you? Create Your Porfile
Avatar

Atsushi Itou

Hitachi

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Atsushi Itou is active.

Explore More

Publication

Featured researches published by Atsushi Itou.

Archive | 1993

Vacuum processing system

Shigekazu Kato; Naoyuki Tamura; Kouji Nishihata; Tsunehiko Tsubone; Atsushi Itou

Archive | 2001

Vacuum processing apparatus and operating method therefor

Shigekazu Kato; Kouji Nishihata; Tsunehiko Tsubone; Atsushi Itou

Archive | 1990

Low-temperature plasma processor

Kouji Nishihata; Shigekazu Kato; Atsushi Itou; Tsunehiko Tsubone; Naoyuki Tamura

Archive | 1991

Wafer cooling method and apparatus

Tsunehiko Tsubone; Naoyuki Tamura; Shigekazu Kato; Kouji Nishihata; Atsushi Itou

Archive | 1997

Vacuum processing apparatus for substate wafers

Shigekazu Kato; Kouji Nishihata; Tsunehiko Tsubone; Atsushi Itou

Archive | 1995

Vacuum processing method and apparatus

Tsunehiko Tsubone; Naoyuki Tamura; Shigekazu Kato; Kouji Nishihata; Atsushi Itou

Archive | 2008

Plasma processing apparatus and method for detecting status of said apparatus

Tsutomu Tetsuka; Naoshi Itabashi; Atsushi Itou

Archive | 1991

Vacuum processing apparatus and cleaning method therefor

Atsushi Itou; Shigekazu Kato; Kouji Nishihata; Tsunehiko Tsubone

Archive | 2002

Vacuum processing operating method with wafers, substrates and/or semiconductors

Shigekazu Kato; Kouji Nishihata; Tsunehiko Tsubone; Atsushi Itou

Archive | 1999

Vacuum processing and operating method

Shigekazu Kato; Kouji Nishihata; Tsunehiko Tsubone; Atsushi Itou

Explore More

Collaboration

Dive into the Atsushi Itou's collaboration.

Top Co-Authors
Avatar

Kouji Nishihata

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Shigekazu Kato

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Tsunehiko Tsubone

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Naoyuki Tamura

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Koichi Yamamoto

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Naoshi Itabashi

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Tsutomu Tetsuka

Hitachi

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge