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Kouji Nishihata

Hitachi

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Publication

Featured researches published by Kouji Nishihata.

Archive | 1993

Vacuum processing system

Shigekazu Kato; Naoyuki Tamura; Kouji Nishihata; Tsunehiko Tsubone; Atsushi Itou

Archive | 2001

Vacuum processing apparatus and operating method therefor

Shigekazu Kato; Kouji Nishihata; Tsunehiko Tsubone; Atsushi Itou

Archive | 1990

Low-temperature plasma processor

Kouji Nishihata; Shigekazu Kato; Atsushi Itou; Tsunehiko Tsubone; Naoyuki Tamura

Archive | 1991

Wafer cooling method and apparatus

Tsunehiko Tsubone; Naoyuki Tamura; Shigekazu Kato; Kouji Nishihata; Atsushi Itou

Archive | 1997

Vacuum processing apparatus for substate wafers

Shigekazu Kato; Kouji Nishihata; Tsunehiko Tsubone; Atsushi Itou

Archive | 1995

Vacuum processing method and apparatus

Tsunehiko Tsubone; Naoyuki Tamura; Shigekazu Kato; Kouji Nishihata; Atsushi Itou

Archive | 2002

Operating method of vacuum processing system and vacuum processing system

Kouji Nishihata; Kazuhiro Joo; Shoji Ikuhara; Tetsuya Tahara; Shoji Okiguchi

Archive | 2001

Remote diagnostic system for facilities and remote diagnostic method

Kouji Nishihata; Kenji Nakata; Shoji Ikuhara; Hideyuki Yamamoto; Hideaki Kondo

Archive | 2004

Methods of operating vacuum processing equipment and methods of processing wafers

Tooru Ueno; Shigeru Nakamoto; Shoji Okiguchi; Hideki Yamasaki; Kouji Nishihata

Archive | 2004

Vacuum process apparatus and method of operating the same

Tomoyuki Kawano; Kouji Nishihata; Tetsuya Tahara; Shoji Okiguchi; Hideki Yamasaki

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Collaboration

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Atsushi Itou

Hitachi

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Shigekazu Kato

Hitachi

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Tsunehiko Tsubone

Hitachi

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Naoyuki Tamura

Hitachi

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Shoji Ikuhara

Hitachi

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Shigeru Nakamoto

Hitachi

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Shoji Okiguchi

Hitachi

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Hideki Yamasaki

Hitachi

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Kazue Takahashi

Hitachi

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Ken Yoshioka

Hitachi

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