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Featured researches published by Tsunehiko Tsubone.


Archive | 1993

Vacuum processing system

Shigekazu Kato; Naoyuki Tamura; Kouji Nishihata; Tsunehiko Tsubone; Atsushi Itou


Archive | 1984

Method and apparatus for controlling sample temperature

Yutaka Kakehi; Norio Nakazato; Yoshimasa Fukushima; Kousai Hiratsuka; Fumio Shibata; Noriaki Yamamoto; Tsunehiko Tsubone


Archive | 2002

Method of holding substrate and substrate holding system

Naoyuki Tamura; Kazue Takahashi; Youichi Ito; Yoshifumi Ogawa; Hiroyuki Shichida; Tsunehiko Tsubone


Archive | 2001

Vacuum processing apparatus and operating method therefor

Shigekazu Kato; Kouji Nishihata; Tsunehiko Tsubone; Atsushi Itou


Archive | 1990

Low-temperature plasma processor

Kouji Nishihata; Shigekazu Kato; Atsushi Itou; Tsunehiko Tsubone; Naoyuki Tamura


Archive | 2005

Electrode cover for a plasma processing apparatus

Takeo Uchino; Hiroyuki Shichida; Masakazu Isozaki; Tsunehiko Tsubone; Akitaka Makino


Archive | 1991

Wafer cooling method and apparatus

Tsunehiko Tsubone; Naoyuki Tamura; Shigekazu Kato; Kouji Nishihata; Atsushi Itou


Archive | 1986

Vacuum processing unit and apparatus

Yutaka Kakehi; Norio Nakazato; Yoshimasa Fukushima; Fumio Shibata; Tsunehiko Tsubone; Norio Kanai


Archive | 1997

Vacuum processing apparatus for substate wafers

Shigekazu Kato; Kouji Nishihata; Tsunehiko Tsubone; Atsushi Itou


Archive | 1996

Substrate holding system including an electrostatic chuck

Naoyuki Tamura; Kazue Takahashi; Youichi Ito; Yoshifumi Ogawa; Hiroyuki Shichida; Tsunehiko Tsubone

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