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Baiei Kawano

ASM International

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Publication

Featured researches published by Baiei Kawano.

Archive | 2003

Method of film deposition using single-wafer-processing type CVD

Akira Shimizu; Hideaki Fukuda; Baiei Kawano; Kazuo Sato

Archive | 2004

Apparatus for single-wafer-processing type CVD

Akira Shimizu; Hideaki Fukuda; Baiei Kawano; Kazuo Sato

Archive | 2004

Apparatus and method for forming thin film using upstream and downstream exhaust mechanisms

Hiroshi Shinriki; Baiei Kawano; Akira Shimizu

Archive | 2004

Dual-chamber plasma processing apparatus

Yasuhiro Tobe; Yoshinori Morisada; Shingo Ikeda; Baiei Kawano

Archive | 2004

Semiconductor-processing apparatus provided with susceptor and placing block

Akira Shimizu; Hideaki Fukuda; Hiroki Arai; Baiei Kawano; Takayuki Yamagishi

Archive | 2004

Thin-film deposition apparatus

Baiei Kawano

Archive | 2003

Apparatus and method for single-wafer-processing type CVD

Akira Shimizu; Hideaki Fukuda; Baiei Kawano; Kazuo Sato

Archive | 2003

Apparatus and method for CVD

Akira Shimizu; Hideaki Fukuda; Baiei Kawano; Kazuo Sato

Archive | 2003

Verfahren und Vorrichtung zur Gasphasenbeschichtung

Hideaki Fukuda; Baiei Kawano; Kazuo Sato; Akira Shimizu

Archive | 2003

Verfahren und Vorrichtung zur Gasphasenbeschichtung Method and apparatus for gas phase coating

Hideaki Fukuda; Baiei Kawano; Kazuo Sato; Akira Shimizu

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Collaboration

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Akira Shimizu

ASM International

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Hideaki Fukuda

ASM International

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Kazuo Sato

ASM International

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Hiroki Arai

ASM International

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Hiroshi Shinriki

ASM International

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Shingo Ikeda

ASM International

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Takayuki Yamagishi

ASM International

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Yasuhiro Tobe

ASM International

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Yoshinori Morisada

ASM International

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