Banine Vadim Yevgenyevich

Archive Network Publication Hotspot Collaboration

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Banine Vadim Yevgenyevich is active.

Explore More

Publication

Featured researches published by Banine Vadim Yevgenyevich.

Archive | 2001

Lighting system with nested collectors for use in EUV microlithography

Wolfgang Singer; Martin Antoni; Johannes Wangler; Wilhelm Egle; Banine Vadim Yevgenyevich; Loopstra Erik Roelof

Archive | 2008

Laser generation plasma radiation system equipped with foil trap

Bakker Levinus Pieter; Banine Vadim Yevgenyevich; Kurt Ralph; Schuurmans Frank Jeroen Pieter; Sidelnikov Yurii Victorovitch

Archive | 2002

MASK HANDLER, PLATE PROJECTOR, METHOD FOR FABRICATING ELEMENT AND ELEMENT FABRICATED BY THAT METHOD

Moors Johannes Hubertus Joseph; Banine Vadim Yevgenyevich; Leenders Martinus Hendrikus An; Werij Henri Gerard Cato; Visser Hugo Matthieu; Heerens Gerrit-Jan; Ham Erik Leonardus; Meiling Hans; Loopstra Erik Roelof; Donders Sjoerd Nicolaas Lamber

Archive | 2005

LITHOGRAPHY APPARATUS, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED BY SAME

Jacobs Johannes Henricus Wilhe; Banine Vadim Yevgenyevich; Brewster Barrie Dudley; Ivanov Vladimir Vitalevitch; Mertens Bastiaan Matthias; Moors Johannes Hubertus Joseph; Livesey Robert Gordon; Wolschrijn Bastiaan Theodoor

Archive | 2010

Radiation source, lithography apparatus and device manufacturing method

Koshelev Konstantin Nikolaevit; Banine Vadim Yevgenyevich; Ivanov Vladimir Vital Evitch; Kieft Erik Rene; Loopstra Erik Roelof; Stevens Lucas Henricus Johanne; Sidelkov Yurii Victorovitch; Koloshnikov Vsevolod Grigorevi; Krivtsun Vladimir Mihailovitch; Gayazov Robert Rafilevitch; Frijns Olav Waldemar Vladimir

Archive | 2003

ILLUMINATION OPTICAL SYSTEM PROVIDED WITH NESTED CONDENSER

Singer Wolfgang; Antoni Martin; Wangler Johannes; Egle Wilhelm; Banine Vadim Yevgenyevich; Loopstra Erik Roelof

Archive | 2007

SYSTEM AND METHOD OF DETECTING AT LEAST ONE CONTAMINATION SPECIES IN LITHOGRAPHY DEVICE

Banine Vadim Yevgenyevich; Bakker Levinus P; Kurt Ralph; Josephina Moors Johannes Huber; Stevens Lucas Henricus Johanne; Zalm Peter C

Archive | 2007

LITHOGRAPHIC DEVICE COMPRISING ELECTRICAL DISCHARGE GENERATOR AND METHOD FOR CLEANING ELEMENT OF LITHOGRAPHIC DEVICE

Rakhimova Tatyana; Banine Vadim Yevgenyevich; Ivanov Vladimir Vitalevitch; Koshelev Konstantin N; Moors Johannes Hubertus Joseph; Kovalev Aleksander S; Lopaev Dmitriy Victorovich

Archive | 2007