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Benjamin Schwarz

Applied Materials

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Publication

Featured researches published by Benjamin Schwarz.

Archive | 2010

Methods for processing substrates in process systems having shared resources

James P. Cruse; Dermot Cantwell; Ming Xu; Charles Hardy; Benjamin Schwarz; Kenneth S. Collins; Andrew Nguyen; Zhifeng Sui; Evans Lee

Archive | 2013

Plasma spray coating process enhancement for critical chamber components

Jennifer Y. Sun; Biraja P. Kanungo; Ren-Guan Duan; Benjamin Schwarz

Archive | 2012

Ceramic article with reduced surface defect density and process for producing a ceramic article

Ren-Guan Duan; Thorsten Lill; Jennifer Y. Sun; Benjamin Schwarz

Archive | 2011

METHODS FOR REMOVING BYPRODUCTS FROM LOAD LOCK CHAMBERS

Jared Ahmad Lee; Benjamin Schwarz; Xiaoliang Zhuang; Eu Jin Lim; Aduato Diaz; Scott Williams; Andrew Nguyen; James P. Cruse

Archive | 2015

Ceramic article with reduced surface defect density

Ren-Guan Duan; Thorsten Lill; Jennifer Y. Sun; Benjamin Schwarz

Archive | 2013

ELECTROSTATIC CHUCK WITH VARIABLE PIXELATED MAGNETIC FIELD

Chih-Hsun Hsu; Tza-Jing Gung; Benjamin Schwarz; Shahid Rauf; Ankur Agarwal; Vijay D. Parkhe; Michael D. Willwerth; Zhiqiang Guo

Archive | 2014

METHODS FOR EXTENDING CHAMBER COMPONENT LIFE FOR PLASMA PROCESSING SEMICONDUCTOR APPLICATIONS

Feng Chen; Benjamin Schwarz; Valentin N. Todorow; Li Zhang; Tza-Jing Gung; Lu Liu

Archive | 2011

METHOD OF PERFORMING AN IN SITU CHAMBER CLEAN

Siu Tang Ng; Guowen Ding; Teh-Tien Su; Zhuang Li; Benjamin Schwarz; Benjamin Lee

Archive | 2011

Methods for processing substrates in a dual chamber processing system having shared resources

Eu Jin Lim; Adauto Diaz; Benjamin Schwarz; James P. Cruse; Charles Hardy

Archive | 2011

Methods for processing substrates having metal hard masks

Herrick Ng; Guowen Ding; Teh-Tien Sue; Benjamin Schwarz; Zhuang Li

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James P. Cruse

Applied Materials

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Andrew Nguyen

University of Utah

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Charles Hardy

Applied Materials

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Eu Jin Lim

Applied Materials

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Jennifer Y. Sun

Applied Materials

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Ren-Guan Duan

Applied Materials

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Scott Williams

Applied Materials

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Zhuang Li

Applied Materials

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Adauto Diaz

Applied Materials

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Dermot Cantwell

Applied Materials

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