Jennifer Y. Sun
Applied Materials
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Publication
Featured researches published by Jennifer Y. Sun.
advanced semiconductor manufacturing conference | 2000
Jack Yang; Luke Zhang; Joshua Tsui; Anbei Jiang; Jennifer Y. Sun; Kaushik Vaidya; Robert W. Wu
This paper presents ground level feasibility study of mix-run capability on applications of metal via etches in a simulated production environment. A mini-marathon was set up to understand any particulate problems and process shift during mix-run in a MERIE plasma etch tool-a commercially available Super e chamber. Particulate, oxide and PR etch rate data will be shown to demonstrate that Super e is a production worthy etch tool for mix-run with different chemistries on metal via etch applications.
Archive | 2004
Hamid Noorbakhsh; James D. Carducci; Jennifer Y. Sun; Larry D. Elizaga
Archive | 2003
Chang-Lin Hsieh; Diana Xiaobing Ma; Brian Sy-Yuan Shieh; Gerald Zheyao Yin; Jennifer Y. Sun; Senh Thach; Lee Luo; Claes Bjorkman
Archive | 2002
Jennifer Y. Sun; Shun Jackson Wu; Senh Thach; Ananda H. Kumar; Robert W. Wu; Hong Wang; Yixing Lin; Clifford C. Stow
Archive | 2004
Jennifer Y. Sun; Senh Thach; Jim Dempster; Li Xu
Archive | 2008
Nianci Han; Li Xu; Hong Shih; Yang Zhang; Danny Lu; Jennifer Y. Sun
Archive | 2007
Jennifer Y. Sun; Ren-Guan Duan; Jie Yuan; Li Xu; Kenneth S. Collins
Archive | 2001
Jennifer Y. Sun; Clifford C. Stow; Senh Thach
Archive | 2004
Jennifer Y. Sun; Senh Thach; James Dempster; Li Xu; Thanh Pham
Archive | 2004
Daniel J. Hofman; Jennifer Y. Sun; Senh Thach; Yan Ye
