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Benzel Hubert

Bosch

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Featured researches published by Benzel Hubert.

Archive | 2001

Verfahren zur Herstellung eines Halbleiterbauelements sowie ein nach dem Verfahren hergestelltes Halbleiterbauelement

Benzel Hubert; Weber Heribert; Artmann Hans; Schaefer Frank

Archive | 2001

Verfahren zur Herstellung eines Halbleiterbauelements sowie Halbleiterbauelement, insbesondere Membransensor

Benzel Hubert; Weber Heribert; Artmann Hans; Pannek Thorsten; Schaefer Frank

Archive | 2003

Sensor und Verfahren zur Herstellung eines Sensors

Weiblen Kurt; Muchow Joerg; Benzel Hubert; Pinter Stefan; Zappel Bernhard; Muelheim Richard; Guenschel Roland

Archive | 2002

Verfahren zur Herstellung von mikromechanischen Sensoren und damit hergestellte Sensoren

Benzel Hubert; Weber Heribert; Artmann Hans; Schaefer Frank

Archive | 2005

Micromechanical semiconductor component produced by forming a partially oxidised porous layer in a semiconductor substrate

Benzel Hubert; Lammel Gerhard

Archive | 2004

Moisture concentration measurement apparatus has sensitizing layer of oxidized porous silicon and two electrodes

Benzel Hubert; Weber Heribert; Schaefer Frank

Archive | 2015

Mikromechanischer Drucksensor für hohe Drücke

Weiblen Kurt; Muchow Joerg; Benzel Hubert; Guenschel Roland

Archive | 2000

Micro-mechanical component for sensing dew point contains membrane and porous material thermal insulating zone membrane support

Benzel Hubert; Weber Heribert; Schaefer Frank

Archive | 2002

Porous structure production used for sieve or filter comprise anodizing silicon substrate to form porous silicon layer

Benzel Hubert; Weber Heribert; Schaefer Frank

Archive | 2012

Piezoresistive, micromechanical pressure sensor element for determination of e.g. leakage rate of soot particulate filter in exhaust line of motor car, has damping element arranged in deflection region of pressure-sensitive sensor membrane

Benzel Hubert; Schelling Christoph

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Schaefer Frank

Bosch

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Schelling Christoph

Bosch

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Weber Heribert

Bosch

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Muchow Joerg

Bosch

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Guenschel Roland

Bosch

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Armbruster Simon

Infineon Technologies

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Illing Matthias

Bosch

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Pinter Stefan

Bosch

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Haag Frieder

Bosch

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Kramer Torsten

Bosch

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