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Dive into the research topics where Illing Matthias is active.

Publication


Featured researches published by Illing Matthias.


Archive | 2008

Construction unit has two chips that are arranged one above other in connecting area by blocking or tilting microstructures in each other turned chip surfaces, which are mechanically and electrically connected

Benzel Hubert; Schelling Christoph; Illing Matthias


Archive | 2005

Sensor, Steuergerät und Verfahren zum Betrieb von an ein Steuergerät angeschlossenen Sensoren

Hopf Gerald; Ohl Christian; Illing Matthias


Archive | 2006

MICRO-MACHINING TYPE SENSOR ELEMENT

Benzel Hubert; Finkbeiner Stefan Dr; Illing Matthias; Schaefer Frank; Armbruster Simon; Lammel Gerhard; Schelling Christoph; Brasas Joerg


Archive | 2004

Verfahren und Vorrichtung zur Energieversorgung von Sensoren

Marek Jiri; Illing Matthias; Trah Hans-Peter; Schatz Oliver


Archive | 2001

Mikromechanische Struktur, insbesondere für einen Beschleunigungssensor oder Drehratensensor, und entsprechendes Herstellungsverfahren

Franz Jochen; Illing Matthias; Henning Frank; Fischer Frank; Hein Peter


Archive | 2010

Verfahren zur Herstellung eines Bauelements, Verfahren zur Herstellung einer Bauelementanordnung, Bauelement und Bauelementanordnung

Kramer Torsten; Pinter Stefan; Benzel Hubert; Illing Matthias; Haag Frieder; Armbruster Simon


Archive | 2006

MICROMECHANICAL PRESSURE SENSOR AND CORRESPONDING PRODUCTION METHOD

Benzel Hubert; Illing Matthias; Armbruster Simon; Lammel Gerhard


Archive | 2016

Process to produce a component,process to produce a component arrangement component,component and component arrangement

Kramer Torsten; Pinter Stefan; Benzel Hubert; Illing Matthias; Haag Frieder; Armbruster Simon


Archive | 2012

SENSOR, APARATO DE CONTROL Y PROCEDIMIENTO PARA EL FUNCIONAMIENTO DE SENSORES CONECTADOS A UN APARATO DE CONTROL.

Hopf Gerald; Ohl Christian; Illing Matthias


Archive | 2009

Micromechanical component has two elements, where integrated circuit and electrical contact are formed on upper side of former element, and lower side of latter element is fixed on upper side of former element

Farber Paul; Illing Matthias; Benzel Hubert; Weber Heribert

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