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Schaefer Frank

Bosch

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Publication

Featured researches published by Schaefer Frank.

Archive | 2001

Verfahren zur Herstellung eines Halbleiterbauelements sowie ein nach dem Verfahren hergestelltes Halbleiterbauelement

Benzel Hubert; Weber Heribert; Artmann Hans; Schaefer Frank

Archive | 2001

Verfahren zur Herstellung eines Halbleiterbauelements sowie Halbleiterbauelement, insbesondere Membransensor

Benzel Hubert; Weber Heribert; Artmann Hans; Pannek Thorsten; Schaefer Frank

Archive | 2002

Verfahren zur Herstellung von mikromechanischen Sensoren und damit hergestellte Sensoren

Benzel Hubert; Weber Heribert; Artmann Hans; Schaefer Frank

Archive | 2004

Moisture concentration measurement apparatus has sensitizing layer of oxidized porous silicon and two electrodes

Benzel Hubert; Weber Heribert; Schaefer Frank

Archive | 2000

Micro-mechanical component for sensing dew point contains membrane and porous material thermal insulating zone membrane support

Benzel Hubert; Weber Heribert; Schaefer Frank

Archive | 2002

Porous structure production used for sieve or filter comprise anodizing silicon substrate to form porous silicon layer

Benzel Hubert; Weber Heribert; Schaefer Frank

Archive | 2002

Halbleiterbauelement, insbesondere ein mikromechanischer Drucksensor

Junger Andreas; Benzel Hubert; Eschrich Heinz; Nitsche Juergen; Schaefer Frank; Vossenberg Heinz-Georg

Archive | 2006

COMPOSANT MICROMECANIQUE ET PROCEDE DE FABRICATION D'UN TEL COMPOSANT

Benzel Hubert; Weber Heribert; Schaefer Frank

Archive | 2002

MICROMACHINING STRUCTURAL MEMBER AND METHOD OF PRODUCING MICROMACHINING STRUCTURAL MEMBER

Benzel Hubert; Weber Heribert; Schaefer Frank

Archive | 2006

MICRO-MACHINING TYPE SENSOR ELEMENT

Benzel Hubert; Finkbeiner Stefan Dr; Illing Matthias; Schaefer Frank; Armbruster Simon; Lammel Gerhard; Schelling Christoph; Brasas Joerg

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Collaboration

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Benzel Hubert

Bosch

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Weber Heribert

Bosch

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Schelling Christoph

Bosch

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Junger Andreas

Bosch

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Nitsche Juergen

Bosch

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Armbruster Simon

Infineon Technologies

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Lammel Gerhard

Infineon Technologies

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Illing Matthias

Bosch

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Arand Dieter

Bosch

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Godzik Gabriele

Bosch

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