Bernhard Gehl

MEMS PRESSURE SENSOR WITH MULTIPLE MEMBRANE ELECTRODES

Capacitive mems-sensor element having bond pads for the electrical contacting of the measuring capacitor electrodes

MEMS Membrane Overtravel Stop

Microphone component i.e. 2-chip microelectromechanical microphone component, for use in region of e.g. mobile communications, has microelectromechanical systems microphone structure whose microphone signal is supplied to electronics unit

MEMS Microphone System having an Electrode Assembly

Method for producing a porous structure in the layer structure of a semiconductor component and MEMS component with such a porous structural element

Method for manufacturing a microphone structure and a pressure sensor structure in the layer structure of a mems element

Überauslenkbegrenzung für eine MEMS-Membran Überauslenkbegrenzung for a MEMS membrane

Überauslenkbegrenzung for a MEMS diaphragm

Verfahren zur Herstellung einer Mikrofonstruktur und einer Drucksensorstruktur im Schichtaufbau eines MEMS-Bauelements A method for manufacturing a microphone structure and a pressure sensor structure in the layer structure of a MEMS device