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Heiko Stahl

Bosch

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Publication

Featured researches published by Heiko Stahl.

Archive | 2005

Micromechanical Component Having Multiple Caverns, and Manufacturing Method

Frank Fischer; Eckhard Graf; Heiko Stahl; Hartmut Kueppers; Roland Scheuerer

Archive | 2005

Micromechanical diaphragm sensor having a double diaphragm

Matthias Illing; Heribert Weber; Christoph Schelling; Heiko Stahl; Stefan Weiss

Archive | 2004

Verfahren zur herstellung eines mikromechanischen bauteils, vorzugsweise für fluidische anwendungen und mikropumpe mit einer pumpmemembran aus einer polysiliciumschicht

Matthias Fuertsch; Hubert Benzel; Stefan Finkbeiner; Stefan Pinter; Frank Fischer; Heiko Stahl; Tjalf Pirk

Archive | 2004

Method for the production of a micromechanical part preferably used for fluidic applications, and micropump comprising a pump membrane made of a polysilicon layer

Matthias Fuertsch; Hubert Benzel; Stefan Finkbeiner; Stefan Pinter; Frank Fischer; Heiko Stahl; Tjalf Pirk

Archive | 2005

Micromechanical component with a number of chambers and production method

Frank Fischer; Eckhard Graf; Heiko Stahl; Hartmut Kueppers; Roland Scheuerer

Archive | 2005

Mikromechanischer membransensor mit doppelmembran

Matthias Illing; Heribert Weber; Christoph Schelling; Heiko Stahl; Stefan Weiss

Archive | 2009

Micromechanical acceleration sensor having an open seismic mass

Heiko Stahl; Dietrich Schubert; Lars Tebje

Archive | 2007

Micromechanical membrane sensor comprising a double membrane

Matthias Illing; Heribert Weber; Christoph Schelling; Heiko Stahl; Stefan Weiss

Archive | 2005

Mikromechanisches Bauelement mit mehreren Kavernen und Herstellungsverfahren

Frank Fischer; Eckhard Graf; Hartmut Kueppers; Roland Scheuerer; Heiko Stahl

Archive | 2015

Component including two semiconductor elements between which at least two hermetically tightly sealed cavities having different internal pressures are formed and method for manufacturing such a component

Friedjof Heuck; Lars Tebje; Heiko Stahl; Jullian Gonska; Reinhard Neul

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Collaboration

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Frank Fischer

Bosch

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Roland Scheuerer

Bosch

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Axel Grosse

Bosch

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Heribert Weber

Bosch

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Hubert Benzel

Bosch

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Jochen Reinmuth

Bosch

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Matthias Fuertsch

Bosch

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Stefan Finkbeiner

Bosch

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Stefan Pinter

Bosch

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Christoph Schelling

Bosch

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