Heiko Stahl

Micromechanical Component Having Multiple Caverns, and Manufacturing Method

Micromechanical diaphragm sensor having a double diaphragm

Verfahren zur herstellung eines mikromechanischen bauteils, vorzugsweise für fluidische anwendungen und mikropumpe mit einer pumpmemembran aus einer polysiliciumschicht

Method for the production of a micromechanical part preferably used for fluidic applications, and micropump comprising a pump membrane made of a polysilicon layer

Micromechanical component with a number of chambers and production method

Mikromechanischer membransensor mit doppelmembran

Micromechanical acceleration sensor having an open seismic mass

Micromechanical membrane sensor comprising a double membrane

Mikromechanisches Bauelement mit mehreren Kavernen und Herstellungsverfahren

Component including two semiconductor elements between which at least two hermetically tightly sealed cavities having different internal pressures are formed and method for manufacturing such a component