Bertrand Flietner

Hybrid manufacture of air gap and gate of Suspended Gate FET without using spacers producing gate separately from base structure, with air gap height based on height difference of channel and field isolators

Spatially uniform gas supply and pump configuration for large wafer diameters

Reduced pad erosion

Self aligned buried plate

Method of forming deep trench capacitors

Process for depositing a surface-wide layer through a mask and optionally closing said mask

Deep trench capacitor

Process for depositing a large-surface layer through a mask and optional closure of said mask

Reduced etch stop layer erosion

Method for producing an actuator