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Boguslaw A. Nagorski

ASM International

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Publication

Featured researches published by Boguslaw A. Nagorski.

Archive | 1994

Wafer polishing machine with fluid bearings

Homayoun Talieh; David Edwin Weldon; Boguslaw A. Nagorski

Archive | 2000

Method of and apparatus for making electrical contact to wafer surface for full-face electroplating or electropolishing

Jalal Ashjaee; Boguslaw A. Nagorski; Bulent M. Basol; Homayoun Talieh; Cyprian Uzoh

Archive | 1994

Wafer polishing machine with fluid bearings and drive systems

David Edwin Weldon; Boguslaw A. Nagorski; Homayoun Talieh

Archive | 2002

Vertically configured chamber used for multiple processes

Konstantin Volodarsky; Boguslaw A. Nagorski; Rimma Volodarsky; Douglas W. Young; Cyprian Uzoh; Homayoun Talieh

Archive | 1999

Work piece carrier head for plating and polishing

Cyprian Uzoh; Boguslaw A. Nagorski; Konstantin Volodarsky; Douglas W. Young

Archive | 2002

Method and system to provide electrical contacts for electrotreating processes

Bulent M. Basol; Homayoun Talieh; Boguslaw A. Nagorski; Cyprian Uzoh; Jeffrey Bogart

Archive | 2002

Method and apparatus for full surface electrotreating of a wafer

Jalal Ashjaee; Boguslaw A. Nagorski; Bulent M. Basol; Homayoun Talieh; Cyprian Uzoh

Archive | 2004

Apparatus for processing surface of workpiece with small electrodes and surface contacts

Jalal Ashjaee; Boguslaw A. Nagorski; Bulent M. Basol; Homayoun Talieh; Cyprian Uzoh

Archive | 2001

Method of using vertically configured chamber used for multiple processes

Konstantin Volodarsky; Boguslaw A. Nagorski; Rimma Volodarsky; Douglas W. Young; Cyprian Uzoh; Homayoun Talieh

Archive | 2001

Procede et appareil permettant d'effectuer un contact electrique a la surface d'une plaquette pour une electrodeposition ou un polissage electrolytique sur toute la surface de cette plaquette

Jalal Ashjaee; Boguslaw A. Nagorski; Bulent M. Basol; Homayoun Talieh; Cyprian Uzoh

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Homayoun Talieh

ASM International

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Cyprian Uzoh

ASM International

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Bulent M. Basol

ASM International

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Jalal Ashjaee

ASM International

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Rimma Volodarsky

ASM International

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Douglas W. Young

Lam Research

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Konstantin Volodarsky

Lam Research

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Douglas W. Young

Lam Research

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Jeffrey Bogart

ASM International

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Konstantin Volodarsky

Lam Research

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