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Douglas W. Young

Lam Research

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Publication

Featured researches published by Douglas W. Young.

Archive | 1997

Sensors for a linear polisher

Anil K. Pant; Joseph R. Breivogel; Douglas W. Young; Rahul Jairath; Erik H. Engdahl

Archive | 1996

Control of chemical-mechanical polishing rate across a substrate surface

Anil K. Pant; Douglas W. Young; Anthony S. Meyer; Konstantin Volodarsky; David Edwin Weldon

Archive | 1996

Technique for improving within-wafer non-uniformity of material removal for performing CMP

Anthony S. Meyer; Thomas G. Mallon; Bradley Withers; Douglas W. Young

Archive | 2002

Vertically configured chamber used for multiple processes

Konstantin Volodarsky; Boguslaw A. Nagorski; Rimma Volodarsky; Douglas W. Young; Cyprian Uzoh; Homayoun Talieh

Archive | 1997

Control of chemical-mechanical polishing rate across a substrate surface for a linear polisher

Anil K. Pant; Joseph R. Breivogel; Douglas W. Young; Robert M. Rivera

Archive | 2001

Semiconductor workpiece proximity plating apparatus

Cyprian Uzoh; Homayoun Talieh; Bulent M. Basol; Douglas W. Young

Archive | 2000

Workpeice proximity plating apparatus

Cyprian Uzoh; Homayoun Talieh; Bulent M. Basol; Douglas W. Young

Archive | 2000

Anode assembly for plating and planarizing a conductive layer

Rimma Volodarsky; Konstantin Volodarsky; Cyprian Uzoh; Homayoun Talieh; Douglas W. Young

Archive | 1997

Method and apparatus for aligning and tensioning a pad/belt used in linear planarization for chemical mechanical polishing

Anil K. Pant; Douglas W. Young; Joseph R. Breivogel; Konstantin Volodarski; Leon Volfovski

Archive | 1999

Work piece carrier head for plating and polishing

Cyprian Uzoh; Boguslaw A. Nagorski; Konstantin Volodarsky; Douglas W. Young

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Homayoun Talieh

ASM International

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Cyprian Uzoh

ASM International

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Konstantin Volodarsky

Lam Research

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Bulent M. Basol

ASM International

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Anil K. Pant

Lam Research

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Jalal Ashjaee

ASM International

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Rimma Volodarsky

ASM International

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Joseph R. Breivogel

Lam Research

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Boguslaw A. Nagorski

ASM International

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Anthony S. Meyer

Lam Research

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