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Konstantin Volodarsky

Lam Research

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Publication

Featured researches published by Konstantin Volodarsky.

Archive | 1997

Wafer polishing head

Konstantin Volodarsky; David Edwin Weldon

Archive | 1996

Control of chemical-mechanical polishing rate across a substrate surface

Anil K. Pant; Douglas W. Young; Anthony S. Meyer; Konstantin Volodarsky; David Edwin Weldon

Archive | 2002

Vertically configured chamber used for multiple processes

Konstantin Volodarsky; Boguslaw A. Nagorski; Rimma Volodarsky; Douglas W. Young; Cyprian Uzoh; Homayoun Talieh

Archive | 2000

Anode assembly for plating and planarizing a conductive layer

Rimma Volodarsky; Konstantin Volodarsky; Cyprian Uzoh; Homayoun Talieh; Douglas W. Young

Archive | 1999

Work piece carrier head for plating and polishing

Cyprian Uzoh; Boguslaw A. Nagorski; Konstantin Volodarsky; Douglas W. Young

Archive | 2002

Method and apparatus of sealing wafer backside for full-face electrochemical plating

Jalal Ashjaee; Homayoun Talieh; Bulent M. Basol; Konstantin Volodarsky

Archive | 2002

Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein

Homayoun Talieh; Konstantin Volodarsky; Jalal Ashjaee; Douglas W. Young

Archive | 2002

Carrier head for holding a wafer and allowing processing on a front face thereof to occur

Bulent M. Basol; Cyprian Uzoh; Konstantin Volodarsky

Archive | 2002

Method of sealing wafer backside for full-face electrochemical plating

Jalal Ashjaee; Homayoun Talieh; Bulent M. Basol; Konstantin Volodarsky

Archive | 2000

Polishing apparatus and method with a refreshing polishing belt and loadable housing

Homayoun Talieh; Konstantin Volodarsky; Jalal Ashjaee; Douglas W. Young

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Homayoun Talieh

ASM International

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Douglas W. Young

Lam Research

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Jalal Ashjaee

ASM International

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Bulent M. Basol

ASM International

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Cyprian Uzoh

ASM International

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Rimma Volodarsky

ASM International

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David Edwin Weldon

Lam Research

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Boguslaw A. Nagorski

ASM International

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Anil K. Pant

Lam Research

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Andrew J. Nagengast

Lam Research

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