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Publication


Featured researches published by Bong-su Ahn.


Archive | 2009

Polishing pad and method of manufacturing the same

Bong-su Ahn; Young-jun Jang; Sang-Mok Lee; Hwi-Kuk Chung; Kee-Cheon Song; Seung-geun Kim; Jang-Won Seo; Jeong-Seon Choo


Archive | 2008

Slurry compositions, methods of preparing slurry compositions, and methods of polishing an object using slurry compositions

Jae-Hyun So; Sung-Taek Moon; Dong-jun Lee; Nam-Soo Kim; Bong-su Ahn; Kyoung-Moon Kang


Archive | 2006

CONDITIONER DEVICE FOR CONDITIONING POLISHING PAD AND CHEMICAL MECHANICAL POLISHING APPARATUS INCLUDING THE SAME

Sung-Taek Moon; Dong-jun Lee; Kyoung-Moon Kang; Nam-Soo Kim; Bong-su Ahn


Archive | 2007

Slurry composition, method of polishing an object layer and method of manufacturing a non-volatile memory device using the slurry composition

Eui-Jin Han; Nam-Soo Kim; Bong-su Ahn; Dong-jun Lee


Archive | 2007

Slurry Composition For a Chemical Mechanical Polishing Process, Method of Polishing an Object Layer and Method of Manufacturing a Semiconductor Memory Device Using the Slurry Composition

Nam-Soo Kim; Jong-Woo Kim; Hyo-Sun Lee; Dong-jun Lee; Bong-su Ahn


Archive | 2008

Pad conditioner of semiconductor wafer polishing apparatus and manufacturing method thereof

Sung-Taek Moon; Kyoung-Moon Kang; Bong-su Ahn; Nam-Soo Kim; Gi-Sik Hong


Archive | 2005

Method of preparing slurry composition for chemical mechanical polishing

Jae-Hyun So; Dong-jun Lee; Nam-Soo Kim; Sung-Taek Moon; Bong-su Ahn; Kyoung-Moon Kang


Archive | 2006

Polishing pad, method of manufacturing the polishing pad, and chemical mechanical polishing apparatus comprising the polishing pad

Kyoung-Moon Kang; Bong-su Ahn; Dong-jun Lee; Nam-Soo Kim; Jae-Hyun So


Archive | 2014

Apparatus for manufacturing polishing pad and method of manufacturing polishing pad using the same

Young-jun Jang; Bong-su Ahn; Jin-Su Jeong; Jung-Sik Choi


Archive | 2014

POLISHING PAD COMPOUND

Young-jun Jang; Bong-su Ahn; Jin-Su Jeong; Jung-Sik Choi

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