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Jae-Hyun So

Samsung

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Publication

Featured researches published by Jae-Hyun So.

Archive | 2003

Polishing pad, platen, method of monitoring, method of manufacturing, and method of detecting

Young-Sam Lim; Dong-jun Lee; Nam-Soo Kim; Sung-Taek Moon; Kyoung-Moon Kang; Jae-Hyun So

Archive | 2002

Additive composition, slurry composition including the same, and method of polishing an object using the slurry composition

Nam-Soo Kim; Sang-mun Chon; Young-Sam Lim; Kyoung-Moon Kang; Sei-Cheol Lee; Jae-Hyun So; Dong-jun Lee

Archive | 2008

Slurry compositions, methods of preparing slurry compositions, and methods of polishing an object using slurry compositions

Jae-Hyun So; Sung-Taek Moon; Dong-jun Lee; Nam-Soo Kim; Bong-su Ahn; Kyoung-Moon Kang

Archive | 2005

Method of preparing slurry composition for chemical mechanical polishing

Jae-Hyun So; Dong-jun Lee; Nam-Soo Kim; Sung-Taek Moon; Bong-su Ahn; Kyoung-Moon Kang

Archive | 2003

Preparation and use of an abrasive slurry composition

Young-Sam Lim; Gi-Hag Lee; Dong-jun Lee; Kyoung-Moon Kang; Jae-Hyun So; Nam-Soo Kim

Archive | 2006

Polishing pad, method of manufacturing the polishing pad, and chemical mechanical polishing apparatus comprising the polishing pad

Kyoung-Moon Kang; Bong-su Ahn; Dong-jun Lee; Nam-Soo Kim; Jae-Hyun So

international symposium on semiconductor manufacturing | 2003

Correlations of ceria abrasives characteristics between calcination temperature and polishing performance

Nam-Soo Kim; Kyung-Moon Kang; Young-Sam Lim; Jae-Hyun So; Sung-Taik Moon; Dong-jun Lee; Sang-Moon Jun

Archive | 2005

酸化セリウム研磨粒子及びその製造方法と、ｃｍｐ用スラリー組成物及びその製造方法と、それらを利用した基板研磨方法

Bong-su Ahn; Kyoung-Moon Kang; Nam-Soo Kim; Dong-jun Lee; Sung-Taek Moon; Jae-Hyun So

Archive | 2004

Polierkissen mit Überwachungsfunktionalität

Kyoung-Moon Kang; Nam-Soo Kim; Dong-jun Lee; Young-Sam Lim; Sung-Taek Moon; Jae-Hyun So

Archive | 2004

Polierkissen mit Überwachungsfunktionalität Polishing pad with monitoring functionality

Kyoung-Moon Kang; Nam-Soo Kim; Dong-jun Lee; Young-Sam Lim; Sung-Taek Moon; Jae-Hyun So

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Collaboration

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Dong-jun Lee

Samsung

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Nam-Soo Kim

Samsung

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Kyoung-Moon Kang

Samsung

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Young-Sam Lim

Samsung

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Sung-Taek Moon

Samsung

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Bong-su Ahn

Samsung

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Sang-mun Chon

Samsung

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Sei-Cheol Lee

Samsung

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