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Dive into the research topics where Kyoung-Moon Kang is active.

Publication


Featured researches published by Kyoung-Moon Kang.


Archive | 2007

Slurry compositions and methods of polishing a layer using the slurry compositions

Gi-Sik Hong; Dong-jun Lee; Nam-Soo Kim; Kyoung-Moon Kang


Archive | 2003

Polishing pad, platen, method of monitoring, method of manufacturing, and method of detecting

Young-Sam Lim; Dong-jun Lee; Nam-Soo Kim; Sung-Taek Moon; Kyoung-Moon Kang; Jae-Hyun So


Archive | 2002

Additive composition, slurry composition including the same, and method of polishing an object using the slurry composition

Nam-Soo Kim; Sang-mun Chon; Young-Sam Lim; Kyoung-Moon Kang; Sei-Cheol Lee; Jae-Hyun So; Dong-jun Lee


Archive | 2008

Slurry compositions, methods of preparing slurry compositions, and methods of polishing an object using slurry compositions

Jae-Hyun So; Sung-Taek Moon; Dong-jun Lee; Nam-Soo Kim; Bong-su Ahn; Kyoung-Moon Kang


Archive | 2006

CONDITIONER DEVICE FOR CONDITIONING POLISHING PAD AND CHEMICAL MECHANICAL POLISHING APPARATUS INCLUDING THE SAME

Sung-Taek Moon; Dong-jun Lee; Kyoung-Moon Kang; Nam-Soo Kim; Bong-su Ahn


Archive | 2008

Pad conditioner of semiconductor wafer polishing apparatus and manufacturing method thereof

Sung-Taek Moon; Kyoung-Moon Kang; Bong-su Ahn; Nam-Soo Kim; Gi-Sik Hong


Archive | 2006

Slurry compositions, methods of polishing polysilicon layers using the slurry compositions and methods of manufacturing semiconductor devices using the slurry compositions

Eui-Jin Han; Nam-Soo Kim; Kyoung-Moon Kang; Dong-jun Lee; Hyo-Sun Lee


Archive | 2005

Method of preparing slurry composition for chemical mechanical polishing

Jae-Hyun So; Dong-jun Lee; Nam-Soo Kim; Sung-Taek Moon; Bong-su Ahn; Kyoung-Moon Kang


Archive | 2003

Preparation and use of an abrasive slurry composition

Young-Sam Lim; Gi-Hag Lee; Dong-jun Lee; Kyoung-Moon Kang; Jae-Hyun So; Nam-Soo Kim


Archive | 2011

POLISHING PAD FOR CHEMICAL MECHANICAL POLISHING PROCESS AND CHEMICAL MECHANICAL POLISHING APPARATUS INCLUDING THE SAME

One-moon Chang; Jae-Phil Boo; Soo-Young Tak; Jong-Sun Ahn; Shin Kim; Kyoung-Moon Kang

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