Is this you? Create Your Porfile
Avatar

Brett C. Richardson

Lam Research

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Brett C. Richardson is active.

Explore More

Publication

Featured researches published by Brett C. Richardson.

Archive | 1999

Method of cleaning and conditioning plasma reaction chamber

Brett C. Richardson; Duane Outka

Archive | 1999

Method of and apparatus for minimizing plasma instability in an RF processor

Brett C. Richardson; Tuan Ngo

Archive | 1996

Method of and apparatus for controlling reactive impedances of a matching network connected between an RF source and an RF plasma processor

Brett C. Richardson; Tuan Ngo; Michael Barnes

Archive | 1996

Method of and apparatus for igniting a plasma in an r.f. plasma processor

Michael Barnes; Brett C. Richardson; Tuan Ngo; John Patrick Holland

Archive | 2002

End point determination of process residues in wafer-less auto clean process using optical emission spectroscopy

Vincent Wong; Brett C. Richardson; Andrew Lui; Scott K. Baldwin

Archive | 1996

Methods and apparatus for reducing byproduct particle generation in a plasma processing chamber

Brett C. Richardson; Merrill D. Crapse; Philip Tuley

Archive | 2002

Plasma cleaning of deposition chamber residues using duo-step wafer-less auto clean method

Brett C. Richardson; Vincent Wong

Archive | 2003

Methods and apparatus for optimizing a substrate in a plasma processing system

Roger Patrick; Brett C. Richardson; Norman Williams

Archive | 2002

Duo-step plasma cleaning of chamber residues

Brett C. Richardson; Vincent Wong

Archive | 2011

Component of a substrate support assembly producing localized magnetic fields

Harmeet Singh; Brett C. Richardson; Sung Lee

Explore More

Collaboration

Dive into the Brett C. Richardson's collaboration.

Top Co-Authors
Avatar

Tuan Ngo

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Harmeet Singh

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Norman Williams

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Roger Patrick

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Vincent Wong

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Duane Outka

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Hanh Tuong Ha

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Jason Augustino

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Michael Barnes

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Quan Chau

Lam Research

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge