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Jason Augustino

Lam Research

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Publication

Featured researches published by Jason Augustino.

Archive | 2006

Upper electrode backing member with particle reducing features

Anthony de la Llera; Allan Ronne; Jaehyun Kim; Jason Augustino; Rajinder Dhindsa; Yen-Kun Victor Wang; Saurabh Ullal; Anthony J. Norell; Keith Comendant; William M. Denty

Archive | 2006

Showerhead electrode assembly with gas flow modification for extended electrode life

Jason Augustino; Anthony de la Llera; Allan Ronne; Jaehyun Kim; Rajinder Dhindsa; Yen-Kun Victor Wang; Saurabh Ullal; Anthony J. Norell; Keith Comendant; William M. Denty

Archive | 2011

Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses

Hong Shih; Yaobo Yin; Jason Augustino; Catherine Zhou; Armen Avoyan

Archive | 2008

Cleaning hardware kit for composite showerhead electrode assemblies for plasma processing apparatuses

Jason Augustino; Charles Rising

Archive | 2009

LOWER ELECTRODE ASSEMBLY OF PLASMA PROCESSING CHAMBER

Jason Augustino; Quan Chau; Hanh Tuong Ha; Brett C. Richardson; Harmeet Singh

Archive | 2008

BACKSIDE MOUNTED ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATING THE SAME

Jason Augustino; Armen Avoyan; Yan Fang; Duane Outka; Hong Shih; Stephen Whitten

Archive | 2007

Cleaning of bonded silicon electrodes

Duane Outka; Jason Augustino; Armen Avoyan; Stephen Whitten; Hong Shih; Yan Fang

Archive | 2008

Peripherally engaging electrode carriers and assemblies incorporating the same

Jason Augustino; Armen Avoyan; Yan Fang; Duane Outka; Hong Shih; Stephen Whitten

Archive | 2009

Quartz window for a degas chamber

Jason Augustino; Tim Hart

Archive | 2014

Processing chamber with features from side wall

Dean J. Larson; Jason Augustino; Andreas Fischer; Andre W. Desepte; Harmeet Singh

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Armen Avoyan

Lam Research

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Hong Shih

Lam Research

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Duane Outka

Lam Research

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Harmeet Singh

Lam Research

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Stephen Whitten

Lam Research

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Yan Fang

Lam Research

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Allan Ronne

Lam Research

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Andreas Fischer

Lam Research

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Anthony J. Norell

Lam Research

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Anthony de la Llera

Lam Research

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