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Dive into the research topics where Duane Outka is active.

Publication


Featured researches published by Duane Outka.


Archive | 1999

Method of cleaning and conditioning plasma reaction chamber

Brett C. Richardson; Duane Outka


Archive | 2005

Methods for wet cleaning quartz surfaces of components for plasma processing chambers

Hong Shih; Tuochuan Huang; Duane Outka; Jack Kuo; Shenjian Liu; Bruno Morel; Anthony Chen


Archive | 2007

Extending lifetime of yttrium oxide as a plasma chamber material

Hong Shih; Duane Outka; Shenjian Liu; John Daugherty


Archive | 2008

Processes for reconditioning multi-component electrodes

Armen Avoyan; Yan Fang; Duane Outka; Hong Shih; Stephen Whitten


Archive | 2010

Bare aluminum baffles for resist stripping chambers

Fred Dennis Egley; Michael S. Kang; Anthony Chen; Jack Kuo; Hong Shih; Duane Outka; Bruno Morel


Archive | 2009

Immersive oxidation and etching process for cleaning silicon electrodes

Armen Avoyan; Duane Outka; Catherine Zhou; Hong Shih


Archive | 2013

CORROSION RESISTANT ALUMINUM COATING ON PLASMA CHAMBER COMPONENTS

John Daugherty; Hong Shih; Lin Xu; Anthony Amadio; Robert Griffith O'Neill; Peter Holland; Sivakami Ramanathan; Tae Won Kim; Duane Outka; John Michael Kerns; Sonia Castillo


Archive | 2001

Method of reducing aluminum fluoride deposits in plasma etch reactor

Duane Outka; Yousun Kim; Anthony Chen; John Daugherty


Archive | 2008

BACKSIDE MOUNTED ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATING THE SAME

Jason Augustino; Armen Avoyan; Yan Fang; Duane Outka; Hong Shih; Stephen Whitten


Archive | 2007

Cleaning of bonded silicon electrodes

Duane Outka; Jason Augustino; Armen Avoyan; Stephen Whitten; Hong Shih; Yan Fang

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