Network
Latest external collaboration on country level. Dive into details by clicking on the dots.
Publication
Featured researches published by Brian Lu.
international conference on solid-state and integrated circuits technology | 2008
Yoshi Senzaki; Tom Seidel; J. McCormick; Gi Kim; H. Y. Kim; Zia Karim; Brian Lu; Sasangan Ramanathan; Johannes Lindner; Hugo Silva; M. Daulesberg
Atomic Layer Deposition (ALD) has successfully been applied to advanced microelectronic applications importantly for conformal coatings on high aspect ratio devices. However, traditional ALD is limited in deposition rate because the ability to bring precursors rapidly to the surface. In this paper we review recent results for precursor delivery using advanced vaporization (Trijet) as well as recent advances in Pulsed CVD (AVD®) using art elements held in common with ALD technology. These and other advances - such as Multiple Single Wafer configurations allow ALD application for continued scaling under conditions of improved process control and higher productivity. Key applications include: capacitors (dielectrics and electrodes), transistors and contacts. This paper reviews these technological advances in the context of their applications.
Archive | 2013
Woong Park; Young Jin Jang; Gi Kim; Brian Lu; Greg Siu; Hugo Silva; Sasangan Ramanathan
217th ECS Meeting | 2010
Peter K. Baumann; M. Heuken; U. Weber; P. Lehnen; Yoshi Senzaki; Johannes Lindner; Brian Lu; Ziaul Karim; B. Schineller
Archive | 2015
Ming-Te Liu; Lin Yang; Jerry Mack; Zia Karim; Brian Lu
Archive | 2014
Ming-Te Liu; Lin Yang; Jerry Mack; Zia Karim; Brian Lu
2014 ECS and SMEQ Joint International Meeting (October 5-9, 2014) | 2014
Zia Karim; Kay Song; Lin Yang; Brian Lu
Frontiers in Electronic Materials: A Collection of Extended Abstracts of the Nature Conference Frontiers in Electronic Materials, June 17 to 20 2012, Aachen, Germany | 2013
Cheol Seong Hwang; Woongkyu Lee; Jeong Hwan Han; Woojin Jeon; Yeon Woo Yoo; Changhee Ko; Julien Gatineau; B. Gouat; U. Weber; Peter K. Baumann; M. Heuken; Brian Lu; Susanne Hoffmann-Eifert; M. Reiners; N. Aslam; I. Kärkkänen; J. H. Kim; Rainer Waser; Taeyong Eom; Taehong Gwon; Si Jung Yoo; Moo-Sung Kim; Manchao Xiao; Iain Buchanan
Conference Proceedings by the Society for Solid State and Electrochemical Science and Technology | 2012
Zia Karim; Lin Yang; Jerry Mack; Ming Liu; U. Weber; Peter Baumann; Sasangan Ramanathan; Brian Lu; Wally Czubatyj; Stephen J. Hudgens; Tyler Lowrey
12th International Conference on Atomic Layer Deposition, American Vacuum Society | 2012
Lin Yang; U. Weber; P. K. Maumann; Zia Karim; Sasangan Ramanathan; Brian Lu; Wally Czubatyj; Stephen J. Hudgens; Tyler Lowrey
Symposium on Manufacturing and Technology Section MS2, American Vacuum Society | 2011
Brian Lu; Zia Karim; Sasangan Ramanathan
