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Publication


Featured researches published by Brian T. West.


Archive | 2003

Method of surface texturizing

Alan Popiolkowski; Shannon M. Hart; Marc O. Schweitzer; Alan B. Liu; Jennifer L. Watia; Brian T. West; Mark D. Menzie


Archive | 2008

Fabricating and cleaning chamber components having textured surfaces

Brian T. West; Marc O. Schweitzer; Jennifer L. Watia


Archive | 2002

Halogen-resistant, anodized aluminum for use in semiconductor processing apparatus

Yixing Lin; Brian T. West; Hong Wang; Shun Jackson Wu; Jennifer Y. Sun; Clifford C. Stow; Senh Thach


Archive | 2004

Textured chamber surface

Karl Brueckner; Brian T. West; Hong Wang


Archive | 2004

Erosion resistant textured chamber surface

Karl Brueckner; Brian T. West; Marc O. Schweitzer; Jennifer Watia Tiller; Alan Popiolkowski


Archive | 2004

Cleaning of chamber components

Marc O. Schweitzer; Jennifer Watia Tiller; Brian T. West; Karl Brueckner


Archive | 2006

Removing residues from substrate processing components

Brian T. West; Karl Brueckner; Shun Wu; Robert Haney


Archive | 2005

Chamber component having grooved surface

Brian T. West; Maocheng Li; Hong Wang


Archive | 2011

Process chamber gas flow improvements

Stanley Detmar; Brian T. West; Ronald Vern Schauer


Archive | 2008

PLASMA SPRAYED DEPOSITION RING ISOLATOR

Brian T. West

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