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Marc O. Schweitzer

Applied Materials

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Publication

Featured researches published by Marc O. Schweitzer.

Archive | 2003

Method of surface texturizing

Alan Popiolkowski; Shannon M. Hart; Marc O. Schweitzer; Alan B. Liu; Jennifer L. Watia; Brian T. West; Mark D. Menzie

Archive | 2006

Ring assembly for substrate processing chamber

Jennifer Watia Tiller; Allen Lau; Marc O. Schweitzer; Steven V. Sansoni; Keith A. Miller; Christopher Boitnott

Archive | 2008

Fabricating and cleaning chamber components having textured surfaces

Brian T. West; Marc O. Schweitzer; Jennifer L. Watia

Archive | 2003

End point detection for sputtering and resputtering

Sasson Somekh; Marc O. Schweitzer; John C. Forster; Zheng Xu; Roderick Craig Mosely; Barry L. Chin; Howard Grunes

Archive | 2004

Erosion resistant textured chamber surface

Karl Brueckner; Brian T. West; Marc O. Schweitzer; Jennifer Watia Tiller; Alan Popiolkowski

Archive | 2004

Cleaning of chamber components

Marc O. Schweitzer; Jennifer Watia Tiller; Brian T. West; Karl Brueckner

Archive | 2001

Target sidewall design to reduce particle generation during magnetron sputtering

James Van Gogh; Jim Thompson; Marc O. Schweitzer; Yoichiro Tanaka; Alan Liu; Anthony Chan; Karl M. Brown; John C. Forster

Archive | 2004

Sidewall magnet improving uniformity of inductively coupled plasma and shields used therewith

Tza-Jing Gung; Xianmin Tang; John C. Forster; Peijun Ding; Marc O. Schweitzer; Keith A. Miller; Ilya Lavitsky

Archive | 2003

Method and apparatus for controlling darkspace gap in a chamber

Alan Barry Liu; Marc O. Schweitzer; James Van Gogh; Michael Rosenstein; Jennifer L. Watia; Xinyu Zhang; Yoichiro Tanaka; John C. Forster; Anthony Chen

Archive | 1999

Non-intrusive, on-the-fly (OTF) temperature measurement and monitoring system

Ashok K. Das; Nety M. Krishna; Marc O. Schweitzer; Nalin Patadia; Wei Yang; Umesh Kelkar; Vijay D. Parkhe; Scot Petitt; Nitin Khurana

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John C. Forster

Applied Materials

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Brian T. West

Applied Materials

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Ilya Lavitsky

Applied Materials

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Jennifer L. Watia

Applied Materials

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Jennifer Watia Tiller

Applied Materials

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Keith A. Miller

Applied Materials

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Michael Rosenstein

Applied Materials

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Peijun Ding

Applied Materials

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Tza-Jing Gung

Applied Materials

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Xianmin Tang

Applied Materials

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