Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where Marc O. Schweitzer is active.

Publication


Featured researches published by Marc O. Schweitzer.


Archive | 2003

Method of surface texturizing

Alan Popiolkowski; Shannon M. Hart; Marc O. Schweitzer; Alan B. Liu; Jennifer L. Watia; Brian T. West; Mark D. Menzie


Archive | 2006

Ring assembly for substrate processing chamber

Jennifer Watia Tiller; Allen Lau; Marc O. Schweitzer; Steven V. Sansoni; Keith A. Miller; Christopher Boitnott


Archive | 2008

Fabricating and cleaning chamber components having textured surfaces

Brian T. West; Marc O. Schweitzer; Jennifer L. Watia


Archive | 2003

End point detection for sputtering and resputtering

Sasson Somekh; Marc O. Schweitzer; John C. Forster; Zheng Xu; Roderick Craig Mosely; Barry L. Chin; Howard Grunes


Archive | 2004

Erosion resistant textured chamber surface

Karl Brueckner; Brian T. West; Marc O. Schweitzer; Jennifer Watia Tiller; Alan Popiolkowski


Archive | 2004

Cleaning of chamber components

Marc O. Schweitzer; Jennifer Watia Tiller; Brian T. West; Karl Brueckner


Archive | 2001

Target sidewall design to reduce particle generation during magnetron sputtering

James Van Gogh; Jim Thompson; Marc O. Schweitzer; Yoichiro Tanaka; Alan Liu; Anthony Chan; Karl M. Brown; John C. Forster


Archive | 2004

Sidewall magnet improving uniformity of inductively coupled plasma and shields used therewith

Tza-Jing Gung; Xianmin Tang; John C. Forster; Peijun Ding; Marc O. Schweitzer; Keith A. Miller; Ilya Lavitsky


Archive | 2003

Method and apparatus for controlling darkspace gap in a chamber

Alan Barry Liu; Marc O. Schweitzer; James Van Gogh; Michael Rosenstein; Jennifer L. Watia; Xinyu Zhang; Yoichiro Tanaka; John C. Forster; Anthony Chen


Archive | 1999

Non-intrusive, on-the-fly (OTF) temperature measurement and monitoring system

Ashok K. Das; Nety M. Krishna; Marc O. Schweitzer; Nalin Patadia; Wei Yang; Umesh Kelkar; Vijay D. Parkhe; Scot Petitt; Nitin Khurana

Collaboration


Dive into the Marc O. Schweitzer's collaboration.

Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Researchain Logo
Decentralizing Knowledge