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Bruce Gittleman

Tokyo Electron

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Publication

Featured researches published by Bruce Gittleman.

Archive | 1999

Method and apparatus for ionized physical vapor deposition

John Drewery; Glyn Reynolds; Derrek Andrew Russell; Jozef Brcka; Mirko Vukovic; Michael Grapperhaus; Frank M. Cerio; Bruce Gittleman

Archive | 2002

Ionized PVD with sequential deposition and etching

Rodney Robison; Jacques Faquet; Bruce Gittleman; Tugrul Yasar; Frank M. Cerio; Jozef Brcka

Archive | 1998

Method and apparatus for increasing the metal ion fraction in ionized physical vapor deposition

Jason Smolanoff; Doug Caldwell; Jim Zibrida; Bruce Gittleman; Thomas J. Licata

Archive | 2004

Ionized physical vapor deposition (iPVD) process

Frank M. Cerio; Jacques Faguet; Bruce Gittleman; Rodney L. Robison

Archive | 2004

Processing chamber components, particularly chamber shields, and method of controlling temperature thereof

Mark Kleshock; Bruce Gittleman

Archive | 1997

Method for depositing a low-resistivity titanium-oxynitride (TiON) film that provides for good texture of a subsequently deposited conductor layer

Bruce Gittleman; Vu Bui

Archive | 2002

Ionisierte physikalische dampfphasenabscheidung mit aufeinanderfolgender abscheidung und ätzung

Frank M. Cerio; Bruce Gittleman; Michael Grapperhaus; Glyn Reynolds; Rodney Robison; Tugrul Yasar

Archive | 2002

Depot et gravure en phase vapeur physique ionisee en phases successives

Tugrul Yasar; Glyn Reynolds; Frank M. Cerio; Bruce Gittleman; Michael Grapperhaus; Rodney Robison

Archive | 1999

Verfahren und Gerät zum Erhöhen des Metallionenanteils bei einer ionisierten physikalischen Aufdampfung Method and apparatus for increasing the proportion of metal ions in an ionized physical vapor deposition

Jason Smolanoff; Jim Zibrida; Bruce Gittleman; Thomas J. Licata

Archive | 1999

Method and apparatus for increasing the proportion of metal ions in an ionized physical vapor deposition

Jason Smolanoff; Jim Zibrida; Bruce Gittleman; Thomas J. Licata

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Collaboration

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Frank M. Cerio

Tokyo Electron

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Jason Smolanoff

Tokyo Electron

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Jim Zibrida

Tokyo Electron

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Thomas J. Licata

Tokyo Electron

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Glyn Reynolds

Tokyo Electron

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Michael Grapperhaus

Tokyo Electron

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Jozef Brcka

Tokyo Electron

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Derrek Andrew Russell

Tokyo Electron

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Doug Caldwell

Tokyo Electron

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Jacques Faguet

Tokyo Electron

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