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Thomas J. Licata

Tokyo Electron

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Publication

Featured researches published by Thomas J. Licata.

Archive | 1998

Method and apparatus for increasing the metal ion fraction in ionized physical vapor deposition

Jason Smolanoff; Doug Caldwell; Jim Zibrida; Bruce Gittleman; Thomas J. Licata

Archive | 1997

Apparatus for ionized sputtering

Alexander D. Lantsman; Thomas J. Licata

Archive | 2000

In-situ pre-metallization clean and metallization of semiconductor wafers

Thomas J. Licata

Archive | 1999

Physical vapor processing of a surface with non-uniformity compensation

Thomas J. Licata; Steven Hurwitt

Archive | 1998

Method and apparatus for ionized sputtering of materials

Kaihan Abidi Ashtiani; Israel Wagner; Corey A. Weiss; James Seirmarco; Claude Macquignon; Thomas J. Licata; Alexander D. Lantsman

Archive | 2000

Optimized liners for dual damascene metal wiring

Thomas J. Licata; Joseph T. Hillman

Archive | 2001

Redistribution of copper deposited films

Chantal J. Arena-Foster; Robert F. Foster; Joseph T. Hillman; Thomas J. Licata; Tugrul Yasar

Archive | 1999

Process apparatus and method for improved plasma processing of a substrate

William D. Jones; Robert C. Rowan; Edward L. Sill; Thomas J. Licata

Archive | 1999

Plasma process enhancement through reduction of gaseous contaminants

Edward L. Sill; Thomas J. Licata

Archive | 1999

Verfahren und Gerät zum Erhöhen des Metallionenanteils bei einer ionisierten physikalischen Aufdampfung Method and apparatus for increasing the proportion of metal ions in an ionized physical vapor deposition

Jason Smolanoff; Jim Zibrida; Bruce Gittleman; Thomas J. Licata

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Bruce Gittleman

Tokyo Electron

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Jason Smolanoff

Tokyo Electron

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Jim Zibrida

Tokyo Electron

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Edward L. Sill

Tokyo Electron

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Joseph T. Hillman

Tokyo Electron

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Kaihan Abidi Ashtiani

Tokyo Electron

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Steven Hurwitt

Tokyo Electron

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Alexander D. Lantsman

Sony Broadcast

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Chantal J. Arena-Foster

Tokyo Electron

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Doug Caldwell

Tokyo Electron

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