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Bruno Spuler

Infineon Technologies

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Publication

Featured researches published by Bruno Spuler.

Archive | 1998

Metallization etching techniques for reducing post-etch corrosion of metal lines

Martin Gutsche; Peter Strobl; Stephan Wege; Eike Lueken; Georg Stojakovic; Bruno Spuler

Archive | 1999

Method of improving the etch resistance of chemically amplified photoresists by introducing silicon after patterning

Uwe Schroeder; Gerhard Kunkel; Alois Gutmann; Bruno Spuler

Archive | 2002

Method for clamping a semiconductor device in a manufacturing process

Manfred Kraxenberger; Ines Thümmel; Bruno Spuler; Thorsten Schedel; Karl E. Mautz

Archive | 2000

Method for manufacturing of a semiconductor device

Manfred Kraxenberger; Ines Kneupel; Bruno Spuler; Thorsten Schedel; Karl Mautz

Archive | 1999

Metallization etching method using a hard mask layer

Martin Gutsche; Eike Lueken; Bruno Spuler; Georg Stojakovic; Peter Strobl; Stephan Wege

Archive | 1998

Metallization in semiconductor devices

Martin Poughkeepsie Gutsche; Bruno Spuler; Dirk Tobben; Peter Weigand

Archive | 2002

Semiconductor device with self-aligned contact and method for manufacturing the device

Ralf Zedlitz; Bruno Spuler

Archive | 2001

Measuring structure for determining positioning accuracy of semiconductor wafer or exposure mask has reference structure and associated protection structures

Rolf Heine; Thorsten Schedel; Bruno Spuler

Archive | 2001

Semiconductor device with self-aligned contact and method for manufacturing said device

Bruno Spuler; Ralf Zedlitz

Archive | 2001

Meßstruktur zur Bestimmung der Positionsgenauigkeit eines Halbleiterwafers zu einer Maske Measuring structure for determining the positional accuracy of a semiconductor wafer to a mask

Rolf Heine; Thorsten Schedel; Bruno Spuler

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Collaboration

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Thorsten Schedel

Infineon Technologies

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Martin Gutsche

Infineon Technologies

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Rolf Heine

Infineon Technologies

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Dirk Tobben

Infineon Technologies

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Eike Lueken

Infineon Technologies

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Georg Stojakovic

Infineon Technologies

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Manfred Kraxenberger

Infineon Technologies

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Peter Strobl

Infineon Technologies

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Peter Weigand

Infineon Technologies

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Ralf Zedlitz

Infineon Technologies

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