Ralf Zedlitz

Method of structuring layers with a polysilicon layer and an overlying metal or metal silicide layer using a three step etching process with fluorine, chlorine, bromine containing gases

Method of producing doped polysilicon layers and polysilicon layered structrues and method of structuring layers and layered structures which comprise polysilicon layers

Continuous electrooxdiation of sulfuric acid on boron-doped diamond electrodes

PVD method and PVD apparatus

Wafer handling device and method for testing wafers

CVD method of producing in situ-doped polysilicon layers and polysilicon layered structures

Semiconductor device with self-aligned contact and method for manufacturing the device

Method of producing doped polysilicon layers and polysilicon layered structures

Process of making a doped polysilicon layer

PVD-Verfahren und PVD-Vorrichtung