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Dive into the research topics where Charles Carlson is active.

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Featured researches published by Charles Carlson.


Archive | 2008

Cluster tool architecture for processing a substrate

Tetsuya Ishikawa; Rick J. Roberts; Helen R. Armer; Leon Volfovski; Jay D. Pinson; Michael R. Rice; David H. Quach; Mohsen Salek; Robert B. Lowrance; John A. Backer; William T. Weaver; Charles Carlson; Chongyang Wang; Jeffrey C. Hudgens; Harald Herchen; Brian Lue


Archive | 1998

Substrate support and lift apparatus and method

Nalin Patadia; Charles Carlson


Archive | 2005

Cartesian robot cluster tool architecture

Mike Rice; Jeffrey C. Hudgens; Charles Carlson; William T. Weaver; Robert B. Lowrance; Eric A. Englhardt; Dean C. Hruzek; Dave Silvetti; Michael Kuchar; Kirk Van Katwyk; Van Hoskins; Vinay Shah


Archive | 2010

Substrate processing sequence in a cartesian robot cluster tool

Mike Rice; Jeffrey C. Hudgens; Charles Carlson; William T. Weaver; Robert B. Lowrance; Eric A. Englhardt; Dean C. Hruzek; Dave Silvetti; Michael Kuchar; Kirk Van Katwyk; Van Hoskins; Vinay Shah


Archive | 2006

Cartesian cluster tool configuration for lithography type processes

Eric A. Englhardt; Michael R. Rice; Jeffrey C. Hudgens; Steve S. Hongkham; Jay D. Pinson; Mohsen Salek; Charles Carlson; William T. Weaver; Helen R. Armer


Archive | 2007

Wet clean system design

Paul E. Lester; Scott Meyer; Wyland L. Atkins; Douglas Richards; Constantin Predoaica; Jeffrey C. Hudgens; Charles Carlson; Penchala N. Kankanala; Michael R. Rice; James S. Papanu; Evanson G. Baiya; John Rosato


Archive | 2005

Substrate gripper for a substrate handling robot

Michael R. Rice; Jeffrey C. Hudgens; Charles Carlson; William T. Weaver; Robert B. Lowrance; Eric A. Englhardt; Dean C. Hruzek; Mario David Silvetti; Michael Kuchar; Kirk Van Katwyk; Van Hoskins; Vinay Shah


Archive | 2006

Method of retaining a substrate during a substrate transferring process

Mike Rice; Jeffrey C. Hudgens; Charles Carlson; William T. Weaver; Robert B. Lowrance; Eric A. Englhardt; Dean C. Hruzek; Mario David Silvetti; Michael Kuchar; Kirk Van Katwyk; Van Hoskins; Vinay Shah


Archive | 2005

Cartesian robot design

Mike Rice; Jeffrey C. Hudgens; Charles Carlson; William T. Weaver; Robert B. Lowrance; Eric A. Englhardt; Dean C. Hruzek; Mario David Silvetti; Michael Kuchar; Vinay Shah


Archive | 2007

SUPINATING CARTESIAN ROBOT BLADE

Jeffrey C. Hudgens; Charles Carlson; Penchala N. Kankanala; Michael R. Rice

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