William T. Weaver | Researchain

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Featured researches published by William T. Weaver.

Archive | 2008

Cluster tool architecture for processing a substrate

Tetsuya Ishikawa; Rick J. Roberts; Helen R. Armer; Leon Volfovski; Jay D. Pinson; Michael R. Rice; David H. Quach; Mohsen Salek; Robert B. Lowrance; John A. Backer; William T. Weaver; Charles Carlson; Chongyang Wang; Jeffrey C. Hudgens; Harald Herchen; Brian Lue

Archive | 2005

Cartesian robot cluster tool architecture

Mike Rice; Jeffrey C. Hudgens; Charles Carlson; William T. Weaver; Robert B. Lowrance; Eric A. Englhardt; Dean C. Hruzek; Dave Silvetti; Michael Kuchar; Kirk Van Katwyk; Van Hoskins; Vinay Shah

Archive | 2008

Datum plate for use in installations of substrate handling systems

William T. Weaver

Archive | 2010

Substrate processing sequence in a cartesian robot cluster tool

Mike Rice; Jeffrey C. Hudgens; Charles Carlson; William T. Weaver; Robert B. Lowrance; Eric A. Englhardt; Dean C. Hruzek; Dave Silvetti; Michael Kuchar; Kirk Van Katwyk; Van Hoskins; Vinay Shah

Archive | 2006

Cartesian cluster tool configuration for lithography type processes

Eric A. Englhardt; Michael R. Rice; Jeffrey C. Hudgens; Steve S. Hongkham; Jay D. Pinson; Mohsen Salek; Charles Carlson; William T. Weaver; Helen R. Armer

Archive | 2005

Substrate gripper for a substrate handling robot

Michael R. Rice; Jeffrey C. Hudgens; Charles Carlson; William T. Weaver; Robert B. Lowrance; Eric A. Englhardt; Dean C. Hruzek; Mario David Silvetti; Michael Kuchar; Kirk Van Katwyk; Van Hoskins; Vinay Shah

Archive | 2006

Method of retaining a substrate during a substrate transferring process

Mike Rice; Jeffrey C. Hudgens; Charles Carlson; William T. Weaver; Robert B. Lowrance; Eric A. Englhardt; Dean C. Hruzek; Mario David Silvetti; Michael Kuchar; Kirk Van Katwyk; Van Hoskins; Vinay Shah

Archive | 2005

Cartesian robot design

Mike Rice; Jeffrey C. Hudgens; Charles Carlson; William T. Weaver; Robert B. Lowrance; Eric A. Englhardt; Dean C. Hruzek; Mario David Silvetti; Michael Kuchar; Vinay Shah

Archive | 2014

SUBSTRATE DEPOSITION SYSTEMS, ROBOT TRANSFER APPARATUS, AND METHODS FOR ELECTRONIC DEVICE MANUFACTURING

William T. Weaver; Malcolm N. Daniel; Robert B. Vopat; Jason M. Schaller; Jacob Newman; Dinesh Kanawade; Andrew J. Constant; Stephen C. Hickerson; Jeffrey C. Hudgens; Marvin L. Freeman

Archive | 2014

WAFER HANDLING SYSTEMS AND METHODS

William T. Weaver; Malcolm N. Daniel; Robert B. Vopat; Jason M. Schaller; Jacob Newman; Dinesh Kanawade; Andrew J. Constant; Stephen C. Hickerson; Jeffrey C. Hudgens; Marvin L. Freeman

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