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Cheng-Hung Chang

TSMC

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Publication

Featured researches published by Cheng-Hung Chang.

Archive | 2007

Method of fabrication of a FinFET element

Cheng-Hung Chang; Chen-Hua Yu; Chen-Nan Yeh; Chu-Yun Fu; Yu-Rung Hsu; Ding-Yuan Chen

Archive | 2008

Germanium FinFETs having dielectric punch-through stoppers

Cheng-Hung Chang; Yu-Rung Hsu; Chen-Yi Lee; Shih-Ting Hung; Chen-Nan Yeh; Chen-Hua Yu

Archive | 2008

FinFETs having dielectric punch-through stoppers

Cheng-Hung Chang; Chen-Hua Yu; Chen-Nan Yeh

Archive | 2008

Dielectric punch-through stoppers for forming FinFETs having dual fin heights

Shih-Ting Hung; Cheng-Hung Chang; Chen-Yi Lee; Chen-Nan Yeh; Chen-Hua Yu

Archive | 2007

Reducing Resistance in Source and Drain Regions of FinFETs

Chen-Hua Yu; Yu-Rung Hsu; Chen-Nan Yeh; Cheng-Hung Chang

Archive | 2011

System and method for source/drain contact processing

Chen-Hua Yu; Cheng-Hung Chang; Chen-Nan Yeh; Yu-Rung Hsu

Archive | 2013

Through-silicon vias for semicondcutor substrate and method of manufacture

Chen-Hua Yu; Cheng-Hung Chang; Ebin Liao; Chia-Lin Yu; Hsiang-Yi Wang; Chun Hua Chang; Li-Hsien Huang; D.C.W. Kuo; Tsang-Jiuh Wu; Wen-Chih Chiou

Archive | 2009

Semiconductor Devices with Low Junction Capacitances and Methods of Fabrication Thereof

Cheng-Hung Chang; Yu-Rung Hsu; Chen-Hua Yu

Archive | 2010

Hybrid Metal Fully Silicided (FUSI) Gate

Chen-Hua Yu; Cheng-Tung Lin; Cheng-Hung Chang; Hsiang-Yi Wang; Chen-Nan Yeh

Archive | 2009

Methods of fabrication of semiconductor devices with low capacitance

Cheng-Hung Chang; Yu-Rung Hsu; Chen-Hua Yu

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Collaboration

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Chen-Hua Yu

TSMC

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Chen-Nan Yeh

TSMC

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Yu-Rung Hsu

TSMC

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Hsiang-Yi Wang

TSMC

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Chen-Yi Lee

TSMC

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Chia-Lin Yu

TSMC

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Chun Hua Chang

TSMC

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D.C.W. Kuo

TSMC

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Ebin Liao

TSMC

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Li-Hsien Huang

TSMC

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