Chester Alexander Wasik

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Featured researches published by Chester Alexander Wasik.

Archive | 1980

Situ rate and depth monitor for silicon etching

Robert Middleton Booth; Chester Alexander Wasik

Archive | 1978

Optical system and technique for unambiguous film thickness monitoring

Charles A. Gaston; Joseph P. Kirk; Chester Alexander Wasik

Archive | 1991

Segmented mask and exposure system for x-ray lithography

Alexander Leon Flamholz; Robert Philip Rippstein; Yuli Vladimirsky; Chester Alexander Wasik

Archive | 1979

Process and device for the interferometric measurement of changing film thicknesses

Charles A. Gaston; Joseph P. Kirk; Chester Alexander Wasik

Archive | 2002

Method to obtain transparent image of resist contact hole or feature by SEM without deforming the feature by ion beam

Wei Lu; Charles N. Archie; Chester Alexander Wasik

Archive | 1981

RATE AND DEPTH MONITOR FOR SILICON ETCHING

Robert Middleton Booth; Chester Alexander Wasik

Archive | 2004

Pt coating initiated by indirect electron beam for resist contact hole metrology

Wei Lu; Chester Alexander Wasik

Archive | 2004

High resolution cross-sectioning of polysilicon features with a dual beam tool

Charles N. Archie; Wei Lu; Chester Alexander Wasik

Archive | 1992

Lithography mask, lithography-mask design and alignment and sequential exposure system

Alexander Leon Flamholz; Robert P. Rippstein; Yuli Vladimirsky; Chester Alexander Wasik; レオンフラムホールツアレキサンダー; アレキサンダーワシクチェスター; ブラディミアスキーユリ; フィリップリップステインロバート

Archive | 1981