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Chien-Hsueh Shih

TSMC

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Publication

Featured researches published by Chien-Hsueh Shih.

Archive | 2005

Copper interconnection with conductive polymer layer and method of forming the same

Chien-Hsueh Shih; Minghsing Tsai; Hung-Wen Su; Shau-Lin Shue

Archive | 2012

Process for improving copper line cap formation

Chien-Hsueh Shih; Minghsing Tsai; Chen-Hua Yu; Ming-Shih Yeh

Archive | 2007

Semiconductor interconnection structure and method for making the same

Chen-Hua Yu; Shau-Lin Shue; Chien-Hsueh Shih; Ming-Shih Yeh; Ming-Han Lee

Archive | 2007

Transitional Interface between metal and dielectric in interconnect structures

Chien-Hsueh Shih; Shau-Lin Shue

Archive | 2005

Copper interconnect structures and fabrication method thereof

Chien-Hsueh Shih; Minghsing Tsai; Hung-Wen Su

Archive | 2004

Chemical structures and compositions of ECP additives to reduce pit defects

Chien-Hsueh Shih; Minghsing Tsai; Shau-Lin Shue

Archive | 2007

Salicidation process using electroless plating to deposit metal and introduce dopant impurities

Shau-Lin Shue; Ting-Chu Ko; Chien-Hsueh Shih

Archive | 2005

Silicide structure for ultra-shallow junction for MOS devices

Chien-Hsueh Shih; Shih-Wei Chou; Hung-Wen Su; Minghsing Tsai

Archive | 2004

ECP polymer additives and method for reducing overburden and defects

Chien-Hsueh Shih; Shaulin Shue

Archive | 2005

Uniform passivation method for conductive features

Chien-Hsueh Shih; Hung-Wen Su; Minghsing Tsai

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Collaboration

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Minghsing Tsai

TSMC

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Shau-Lin Shue

TSMC

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Hung-Wen Su

TSMC

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Chen-Hua Yu

TSMC

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Ming-Shih Yeh

TSMC

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Ming-Han Lee

TSMC

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Shih-Wei Chou

TSMC

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Ting-Chu Ko

TSMC

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