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Richard S. Muka

Varian Semiconductor

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Publication

Featured researches published by Richard S. Muka.

Archive | 1998

Automated wafer buffer for use with wafer processing equipment

Richard S. Muka

Archive | 2007

Techniques for low-temperature ion implantation

Jonathan Gerald England; Steven R. Walther; Richard S. Muka; Julian G. Blake; Paul J. Murphy; Reuel B. Liebert

Archive | 2007

Techniques for temperature-controlled ion implantation

Jonathan Gerald England; Richard S. Muka; Edwin A. Arevalo; Ziwei Fang; Vikram Singh

Archive | 2005

Clamp for use in processing semiconductor workpieces

Richard S. Muka; Paul J. Murphy; David E. Suuronen

Archive | 2006

Johnsen-Rahbek electrostatic chuck driven with AC voltage

Richard S. Muka; Alexander S. Perel; Paul J. Murphy

Archive | 2001

BATCH END EFFECTOR FOR SEMICONDUCTOR WAFER HANDLING

Richard S. Muka

Archive | 2011

METHOD AND APPARATUS FOR LIFTING A HORIZONTALLY-ORIENTED SUBSTRATE FROM A CASSETTE

John Robert Fairhurst; Jeffrey E. Krampert; Richard J. Hertel; Richard S. Muka

Archive | 2011

SYSTEM AND METHOD FOR GAS LEAK CONTROL IN A SUBSTRATE HOLDER

Timothy J. Miller; Richard S. Muka; Julian G. Blake

Archive | 2008

Processing System Platen having a Variable Thermal Conductivity Profile

Vikram Singh; Richard S. Muka; Timothy J. Miller; Changhoon Choi

Archive | 2008

Platine de système de traitement possédant un profil variable de conductivité thermique

Vikram Singh; Richard S. Muka; Timothy Miller; Changhoon Choi

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Paul J. Murphy

Varian Semiconductor

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Vikram Singh

Varian Semiconductor

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Alexander S. Perel

Varian Semiconductor

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Changhoon Choi

Varian Semiconductor

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Jonathan Gerald England

Varian Semiconductor

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Julian G. Blake

Varian Semiconductor

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Timothy J. Miller

Varian Semiconductor

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David E. Suuronen

Varian Semiconductor

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Edwin A. Arevalo

Varian Semiconductor

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Jeffrey E. Krampert

Varian Semiconductor

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