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Christopher J. Leavitt

Varian Semiconductor

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Publication

Featured researches published by Christopher J. Leavitt.

Archive | 2010

METHOD AND APPARATUS FOR PLASMA DOSE MEASUREMENT

Joseph P. Dzengeleski; Timothy J. Miler; Jay T. Scheuer; Christopher J. Leavitt

Archive | 2011

APPARATUS AND METHOD FOR MASKLESS PATTERNED IMPLANTION

Christopher J. Leavitt; Ludovic Godet; Timothy J. Miller

Archive | 2010

CONTROL APPARATUS FOR PLASMA IMMERSION ION IMPLANTATION OF A DIELECTRIC SUBSTRATE

Timothy Miller; Vikram Singh; Ludovic Godet; Christopher J. Leavitt

Archive | 2011

APPARATUS AND METHOD FOR CHARGE NEUTRALIZATION DURING PROCESSING OF A WORKPIECE

Peter F. Kurunczi; Christopher J. Leavitt; Daniel Distaso; Timothy J. Miller

Archive | 2014

Method of improving ion beam quality in an implant system

Bon-Woong Koo; Christopher J. Leavitt; Peter F. Kurunczi; Timothy J. Miller; Svetlana Radovanov

Archive | 2013

Method and system for controlling critical dimension and roughness in resist features

Ludovic Godet; Christopher J. Leavitt; Joseph C. Olson; Patrick M. Martin

Archive | 2011

TECHNIQUE AND APPARATUS FOR MONITORING ION MASS, ENERGY, AND ANGLE IN PROCESSING SYSTEMS

Ludovic Godet; Christopher J. Leavitt; Bon Woong Koo; Anthony Renau

Archive | 2017

Method Of Improving Ion Beam Quality In A Non-Mass-Analyzed Ion Implantation System

Bon-Woong Koo; Christopher J. Leavitt; John A. Frontiero; Timothy J. Miller; Svetlana Radovanov

Archive | 2013

Method Of Cleaning An Extraction Electrode Assembly Using Pulsed Biasing

Christopher J. Leavitt; Peter F. Kurunczi

Archive | 2013

Beamline electrode voltage modulation for ion beam glitch recovery

Piotr R. Lubicki; Christopher J. Leavitt; Timothy J. Miller; Bon-Woong Koo

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Timothy J. Miller

Varian Semiconductor

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Bon-Woong Koo

Varian Semiconductor

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Ludovic Godet

Varian Semiconductor

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Peter F. Kurunczi

Varian Semiconductor

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John A. Frontiero

Varian Semiconductor

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Svetlana Radovanov

Varian Semiconductor

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Timothy Miller

Applied Materials

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Jay T. Scheuer

Varian Semiconductor

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Nicholas P.T. Bateman

Varian Semiconductor

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Piotr R. Lubicki

Varian Semiconductor

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