Chung-Hui Su

Process of making a polysilicon barrier layer in a self-aligned contact module

Method for forming buried plug contacts on semiconductor integrated circuits

Unified contact plug process for static random access memory (SRAM) having thin film transistors

Method of making a dram circuit with fin-shaped stacked capacitors

Process to fabricate stacked capacitor DRAM and low power thin film transistor SRAM devices on a single semiconductor chip

Process for forming stacked contacts and metal contacts on static random access memory having thin film transistors

High resistance polysilicon resistor for integrated circuits and method of fabrication thereof

Three dimensional polysilicon resistor for integrated circuits

Unified stacked contact process for static random access memory (SRAM) having polysilicon load resistors

Process to fabricate hemispherical grain polysilicon