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Cui Hushan

Chinese Academy of Sciences

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Publication

Featured researches published by Cui Hushan.

Archive | 2015

FinFet device source and drain epitaxial equipment

Wang Guilei; Cui Hushan; Yin Huaxiang; Li Junfeng; Zhao Chao

Archive | 2017

METHOD OF MONOLITHIC INTEGRATION OF HYPERSPECTRAL IMAGE SENSOR

Cui Hushan; Xiang Jinjuan; He Xiaobin; Yang Tao; Li Junfeng; Zhao Chao

Archive | 2017

Method for manufacturing nanowire structure

Li Junjie; Cui Hushan; Zhu Huilong; Zhao Chao

Archive | 2016

FinFet device source and drain epitaxial equipment and method

Wang Guilei; Cui Hushan; Yin Huaxiang; Li Junfeng; Zhao Chao

Archive | 2016

Monitoring method for channel replacing process

Yang Tao; Wang Guilei; Chen Tao; Cui Hushan; Lu Yihong; Li Junfeng; Zhao Chao

Archive | 2016

Local cleaning device and method for wafer

Yang Tao; Liu Jinbiao; Lu Yihong; Zhang Yue; Cui Hushan

Archive | 2016

APPARATUS AND METHOD FOR EPITAXIALLY GROWING SOURCES AND DRAINS OF A FINFET DEVICE

Wang Guilei; Cui Hushan; Yin Huaxiang; Li Junfeng; Zhao Chao

Archive | 2016

Method for monitoring source-drain trench process

Yang Tao; Wang Guilei; Li Junfeng; Cui Hushan; Lu Yihong; Zhao Chao

Archive | 2016

Polishing solution stirring device and method

Yang Tao; Lu Yihong; Zhang Yue; Cui Hushan

Archive | 2016

Removing method of native oxide layer of FinFet device before source-drain epitaxy

Wang Guilei; Cui Hushan; Yin Huaxiang; Li Junfeng; Zhao Chao

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Collaboration

Dive into the Cui Hushan's collaboration.

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Zhao Chao

Chinese Academy of Sciences

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Li Junfeng

Chinese Academy of Sciences

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Wang Guilei

Chinese Academy of Sciences

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Yin Huaxiang

Chinese Academy of Sciences

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Xiang Jinjuan

Chinese Academy of Sciences

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Zhu Huilong

Chinese Academy of Sciences

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Bao Qilong

Chinese Academy of Sciences

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Huang Sen

Chinese Academy of Sciences

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Liu Xinyu

Chinese Academy of Sciences

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Meng Lingkuan

Chinese Academy of Sciences

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