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Wang Guilei

Chinese Academy of Sciences

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Publication

Featured researches published by Wang Guilei.

Archive | 2014

Silicon nitride manufacturing method

Wang Guilei; Qin Changliang; Li Junfeng; Zhao Chao

Archive | 2015

FinFet device source and drain epitaxial equipment

Wang Guilei; Cui Hushan; Yin Huaxiang; Li Junfeng; Zhao Chao

Archive | 2014

Fin structure manufacturing method

Zhu Huilong; Xu Miao; Luo Jun; Chunlong Li; Wang Guilei

Archive | 2012

Shallow trench isolation manufacturing method

Tang Zhaoyun; Yan Jiang; Yang Tao; Wang Guilei

Archive | 2012

Method and device for preventing dichloroethylene of oxidized furnace tube from losing effectiveness

Li Chunlong; Wang Guilei; Li Junfeng; Zhao Chao

Archive | 2017

Method for reducing silicon-based optical waveguide sidewall roughness

Wang Guilei; Zhang Yanbo; Henry Redeson; Li Junfeng; Zhao Chao

Archive | 2017

Manufacturing method of nanowire and groove structure for manufacturing nanowire

Deng Zhen; Li Junfeng; Wang Guilei; Ding Yunling; Liu Honggang; Zhao Chao

Archive | 2017

Multi-hole floating membrane and preparation method thereof

Yang Tao; Wang Guilei; Li Junfeng

Archive | 2017

CMOS making method

Yin Huaxiang; Qin Changliang; Wang Guilei; Deng Zhen; Zhu Huilong

Archive | 2017

Method for adjusting shape of fin body

Wang Guilei; Zhang Yanbo; Yin Huaxiang; Li Junfeng; Zhao Chao

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Collaboration

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Li Junfeng

University of Science and Technology of China

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Zhao Chao

Chinese Academy of Sciences

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Yin Huaxiang

Chinese Academy of Sciences

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Cui Hushan

Chinese Academy of Sciences

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Zhu Huilong

Chinese Academy of Sciences

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Yan Jiang

Chinese Academy of Sciences

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Chen Dapeng

Chinese Academy of Sciences

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Ye Tianchun

Chinese Academy of Sciences

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Jiao Binbin

Chinese Academy of Sciences

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Kong Yanmei

Chinese Academy of Sciences

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