Dan Marohl

End effector for semiconductor wafer transfer device and method of moving a wafer with an end effector

Semiconductor wafer alignment member and clamp ring

Lid and door for a vacuum chamber and pretreatment therefor

Degassing method and apparatus

End effector for wafer handler in processing system

Compact apparatus and method for storing and loading semiconductor wafer carriers

Apparatus and method for cooling a substrate

Clamp ring for domed heated pedestal in wafer processing chamber

Transfer chamber with side wall port

Retaining ring with flange for chemical mechanical polishing