Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where Timothy J. Franklin is active.

Publication


Featured researches published by Timothy J. Franklin.


Archive | 2001

Transfer chamber with side wall port

Timothy J. Franklin; Dan Marohl


Archive | 1999

Method and apparatus for baking out a gate valve in a semiconductor processing system

Timothy J. Franklin; David Datong Huo


Archive | 2000

Multiple blade robot adjustment apparatus and associated method

Donald J. K. Olgado; Avi Tepman; Timothy J. Franklin


Archive | 2002

Integrated platen assembly for a chemical mechanical planarization system

Timothy J. Franklin; Dan Marohl


Archive | 2008

Single wafer method and apparatus for drying semiconductor substrates using an inert gas air-knife

Nathan D. Stein; Younes Achkire; Timothy J. Franklin; Julia Svirchevski; Dan Marohl


Archive | 2009

Method of depositing materials on a non-planar surface

Dan Marohl; Timothy J. Franklin; Ratson Morad


Archive | 2011

METHOD AND APPARATUS FOR ATOMIC HYDROGEN SURFACE TREATMENT DURING GaN EPITAXY

Thai Cheng Chua; Timothy J. Franklin; Philip A. Kraus


Archive | 2008

Single wafer apparatus for drying semiconductor substrates using an inert gas air-knife

Nathan D. Stein; Younes Achkire; Timothy J. Franklin; Julia Svirchevski; Dan Marohl


Archive | 2007

Carrier used for deposition of materials on a non-planar surface

Dan Marohl; Timothy J. Franklin; Ratson Morad


Archive | 2011

High Throughput Processing Using Metal Organic Chemical Vapor Deposition

Philip A. Kraus; Tony P. Chiang; Timothy J. Franklin; Chi-I Lang; Sandeep Nijhawan

Collaboration


Dive into the Timothy J. Franklin's collaboration.

Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Researchain Logo
Decentralizing Knowledge